{"id":"W2139064708","doi":"10.1109/smicnd.2001.967514","title":"Analysis of the subthreshold shift induced by the shallow trench isolation corner in advanced DRAM and flash memories","year":2002,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"CMC Microsystems (Canada)","funders":"","keywords":"Shallow trench isolation; Dram; NMOS logic; Trench; Transistor; Gate oxide; Optoelectronics; NAND gate; Subthreshold conduction; Materials science; Flash (photography); Electrical engineering; Logic gate; Flash memory; Computer science; Engineering; Layer (electronics); Embedded system; Physics; Optics; Nanotechnology; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009079486,0.0001392631,0.0001472883,0.0001931215,0.0001079766,0.0001374397,0.0001795326,0.000148701,0.0007262868],"category_scores_gemma":[0.000376021,0.00007287761,0.0001170504,0.0002844933,0.0001150376,0.0001721233,0.00008447801,0.0001409472,0.0001207325],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000163129,"about_ca_system_score_gemma":0.0001068646,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001075219,"about_ca_topic_score_gemma":0.001894876,"domain_scores_codex":[0.9999374,0.000006261288,0.000002919767,0.000008348906,0.00003093628,0.00001414498],"domain_scores_gemma":[0.9997644,0.00008820709,0.0000490462,0.00002386083,0.00006101471,0.00001341729],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0003552744,0.00004338423,0.005710352,0.0000861432,0.0000316543,0.0002617554,0.00006142524,0.02338567,0.9564382,0.0003004738,0.0001362701,0.01318924],"study_design_scores_gemma":[0.00001805194,0.0009669231,0.05176607,0.000007942826,0.00007445974,0.0002997016,0.00006549683,0.09273377,0.8527577,0.0003356916,0.0009471749,0.00002711489],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9977519,0.0002348014,0.00155101,0.00001212586,0.000003512739,0.000002325475,0.00006551082,0.00003585041,0.000342882],"genre_scores_gemma":[0.9990645,0.0000946543,0.0004500302,0.000005319576,0.000003208983,0.000001704557,0.00007181662,0.00000573893,0.0003030345],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001075219,"threshold_uncertainty_score":0.002429664,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01387629686944061,"score_gpt":0.2023162881688882,"score_spread":0.1884399912994476,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}