{"id":"W2139180413","doi":"10.1002/pssr.201105445","title":"Surface passivation of phosphorus‐diffused n<sup>+</sup>‐type emitters by plasma‐assisted atomic‐layer deposited Al<sub>2</sub>O<sub>3</sub>","year":2011,"lang":"en","type":"article","venue":"physica status solidi (RRL) - Rapid Research Letters","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":74,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Institute of Gender and Health; National Research Foundation Singapore; National University of Singapore; National Research Foundation","keywords":"Passivation; Doping; Common emitter; Atomic layer deposition; Layer (electronics); Materials science; Analytical Chemistry (journal); Silicon; Deposition (geology); Optoelectronics; Nanotechnology; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0006368655,0.0007678895,0.0008712233,0.0006144123,0.0003908226,0.0001579694,0.0009745435,0.0004182909,0.00002204952],"category_scores_gemma":[0.0002627265,0.0008087778,0.0003489849,0.0020368,0.0008043058,0.0005568026,0.0003312546,0.001732934,0.0002098084],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005320474,"about_ca_system_score_gemma":0.0001307093,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002045418,"about_ca_topic_score_gemma":0.00001359896,"domain_scores_codex":[0.9940102,0.0004456786,0.0008831607,0.0009957706,0.001382309,0.002282875],"domain_scores_gemma":[0.9970231,0.0006044751,0.0002216501,0.001361486,0.0003325728,0.0004566953],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002831814,0.0003602067,0.001581539,0.0001603919,0.0004563274,0.0000400157,0.001565741,0.001057549,0.9184146,0.00005587222,0.06815831,0.007866261],"study_design_scores_gemma":[0.001846448,0.0002254662,0.003357197,0.0001157034,0.00005515508,0.000005468939,0.0006766373,0.02126497,0.9689186,0.00005426867,0.002681157,0.0007988919],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954055,0.0005546079,0.0004124505,0.0008918947,0.0002547646,0.0009044315,0.0001318095,0.001084939,0.0003595918],"genre_scores_gemma":[0.9959441,0.002498757,0.0004323008,0.0004492203,0.00007158698,0.0001240668,0.0002090663,0.0002623797,0.000008540254],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06547716,"threshold_uncertainty_score":0.9994363,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03863327499482633,"score_gpt":0.2575933860615149,"score_spread":0.2189601110666886,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}