{"id":"W2139703650","doi":"10.1021/cm400215q","title":"Deposition of Copper by Plasma-Enhanced Atomic Layer Deposition Using a Novel N-Heterocyclic Carbene Precursor","year":2013,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":54,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Copper; Atomic layer deposition; Thermogravimetric analysis; Chemistry; Carbene; Thermal stability; Inorganic chemistry; Layer (electronics); Organic chemistry; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004962916,0.0001927357,0.0003800598,0.00002172518,0.0000221477,0.00004721681,0.0001235362,0.0001672907,0.0005384268],"category_scores_gemma":[0.000009087289,0.0001961783,0.00004718812,0.0000435313,0.00004029108,0.0001959704,0.00002784518,0.00003407388,0.00001252231],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004979763,"about_ca_system_score_gemma":0.000007897345,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001304923,"about_ca_topic_score_gemma":5.549848e-7,"domain_scores_codex":[0.9990034,0.0000121409,0.0004906115,0.0001727154,0.0001253849,0.0001958004],"domain_scores_gemma":[0.9994866,0.00001955587,0.0001815599,0.0001959376,0.00006341242,0.00005297637],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002165113,0.00003085281,0.00001123252,0.0009635871,0.00004438447,1.537945e-7,0.00006738225,0.0002366177,0.9984764,6.868815e-7,0.0001218909,0.00002512841],"study_design_scores_gemma":[0.0004362553,0.00001169157,0.00007086508,0.0002196934,0.00003717605,0.00001388645,0.00003207857,0.0004530528,0.9985144,0.00001523692,0.000007435513,0.0001882485],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9985528,0.00016079,0.0002114078,0.000002663246,0.0003217692,0.0001859215,0.0002033567,0.0000795815,0.0002817145],"genre_scores_gemma":[0.9984372,0.00002499193,0.001237934,0.000006808718,0.0000952724,0.00003415317,0.000110932,0.00003924088,0.00001345238],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001026526,"threshold_uncertainty_score":0.799992,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01337257310815179,"score_gpt":0.2188687195976462,"score_spread":0.2054961464894944,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}