{"id":"W2141421712","doi":"10.1109/leos.2006.279110","title":"Interconnection microvia drilling using solid state UV laser","year":2006,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Interconnection; Materials science; Laser; Laser drilling; Silicon; Optoelectronics; Diode; Drilling; Substrate (aquarium); Optics; Computer science; Metallurgy; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007069229,0.0001191141,0.0001071667,0.00007576041,0.00004589419,0.00007526458,0.00007250848,0.00005008698,0.00006635208],"category_scores_gemma":[0.000003533061,0.0001151648,0.00002600485,0.00008428031,0.00001540138,0.0002426162,0.00002484768,0.00006482165,0.00002937781],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008677162,"about_ca_system_score_gemma":0.000006392603,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003389999,"about_ca_topic_score_gemma":0.00007827742,"domain_scores_codex":[0.9994376,0.000008216208,0.0001878696,0.0001182871,0.00005680888,0.0001911931],"domain_scores_gemma":[0.9998088,0.000008195583,0.00001980353,0.0001119089,0.00002919029,0.00002211337],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000484353,0.000009860215,0.0002241841,0.00007418966,0.000009310176,0.000004259896,0.00004301023,0.03580448,0.9617312,0.00004197484,0.001370594,0.0006820815],"study_design_scores_gemma":[0.00007443136,0.000007616668,0.00006410151,0.00003979172,0.00000584636,0.000008268082,0.000007042074,0.07545861,0.9205324,0.002797093,0.0008456796,0.0001591294],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8026075,0.00002083559,0.1927981,0.000009393811,0.0003171625,0.00005712413,0.000002832593,0.001686106,0.002500987],"genre_scores_gemma":[0.9802414,0.000004313426,0.01931126,0.00002762176,0.0001363341,0.000003574585,0.000006733067,0.00004391104,0.0002249226],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1776339,"threshold_uncertainty_score":0.4696282,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008022564026472553,"score_gpt":0.2207379469719661,"score_spread":0.2127153829454936,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}