{"id":"W2141448361","doi":"10.1109/icicdt.2005.1502594","title":"Evaluation and integration of metal gate electrodes for future generation dual metal CMOS","year":2005,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Metal gate; Work function; Electrode; CMOS; Materials science; Hafnium; Metal; Dual function; Logic gate; Work (physics); Electronic engineering; Function (biology); Optoelectronics; Amorphous solid; Dual (grammatical number); Electrical engineering; Computer science; Transistor; Gate oxide; Metallurgy; Zirconium; Voltage; Engineering; Mechanical engineering; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003393303,0.0002779252,0.0001978845,0.0002150593,0.0002097941,0.0006871062,0.0006515445,0.0005366711,0.0008893298],"category_scores_gemma":[0.0007441424,0.0001282025,0.0001291512,0.0001899225,0.0001135269,0.0007569285,0.0002240781,0.0001686621,0.0002768029],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004347836,"about_ca_system_score_gemma":0.0003297454,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005044742,"about_ca_topic_score_gemma":0.001682388,"domain_scores_codex":[0.9998026,0.0000172066,0.000009796967,0.00002981693,0.0001161824,0.00002435905],"domain_scores_gemma":[0.9997299,0.00003483948,0.00003700097,0.00002874711,0.0001504696,0.00001896794],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001327241,0.00007051432,0.001593912,0.0002104655,0.00002355925,0.0002196402,0.00004697284,0.002504638,0.9621122,0.002211017,0.0005798118,0.03029465],"study_design_scores_gemma":[0.00001327892,0.0007042923,0.002403574,0.00001721294,0.00004056834,0.0004388394,0.0000559756,0.01264559,0.9694399,0.000387952,0.01383865,0.00001420232],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9285642,0.006310822,0.04858374,0.0005672451,0.0002990543,0.0002619823,0.0004730609,0.0005444181,0.01439542],"genre_scores_gemma":[0.8901532,0.002254584,0.1005566,0.00007937218,0.00002860747,0.0000676088,0.0003522944,0.00008069273,0.00642702],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008893298,"threshold_uncertainty_score":0.003154635,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03049053850707448,"score_gpt":0.2715186298157686,"score_spread":0.2410280913086942,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}