{"id":"W2141608484","doi":"10.1109/memsys.2011.5734425","title":"Robust micromachining of compliant mechanisms by nickel silicide","year":2011,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Surface micromachining; Materials science; Chemical-mechanical planarization; Silicide; Layer (electronics); Silicon; Fabrication; Optoelectronics; Nickel; Substrate (aquarium); Polishing; Nanotechnology; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001912467,0.0002750868,0.0002159434,0.0002004954,0.0002010814,0.0003134428,0.0005507011,0.0002537399,0.0006102735],"category_scores_gemma":[0.0003900037,0.0002260618,0.0002386848,0.0001584918,0.0003923717,0.0003550945,0.00053263,0.0002613468,0.0002612576],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002479238,"about_ca_system_score_gemma":0.0003132758,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004993377,"about_ca_topic_score_gemma":0.001015334,"domain_scores_codex":[0.999761,0.00001198266,0.00002040126,0.00005284406,0.00011888,0.00003498537],"domain_scores_gemma":[0.9997461,0.00003177224,0.00008263773,0.00008533805,0.00003283715,0.0000212375],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001889806,0.000007711446,0.0002509536,0.00004312284,0.00001024402,0.00008924495,0.00004885372,0.001079579,0.9884558,0.0009594343,0.0001081081,0.008928054],"study_design_scores_gemma":[0.00002028277,0.0001717954,0.002318732,0.00000590524,0.00001435001,0.000268458,0.00003111518,0.008255864,0.983054,0.000427472,0.005412373,0.00001970128],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9076288,0.001359002,0.08120482,0.0001175926,0.0001622235,0.00006893189,0.0001083743,0.001236226,0.008113949],"genre_scores_gemma":[0.9483949,0.000362088,0.04865827,0.00003574614,0.00002413003,0.00003579427,0.00008160872,0.00005318292,0.002354345],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006102735,"threshold_uncertainty_score":0.002041519,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03574297479392635,"score_gpt":0.201758541683144,"score_spread":0.1660155668892176,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}