{"id":"W2141832440","doi":"10.1109/memsys.1990.110263","title":"CMOS electrothermal microactuators","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":29,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Microactuator; CMOS; Cantilever; Deflection (physics); Fabrication; Materials science; Chip; Optoelectronics; Oxide; Electrical engineering; Composite material; Engineering; Optics; Metallurgy; Physics; Actuator","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000007201641,0.0000585593,0.00004957381,0.00002793267,0.00001518294,0.000005012649,0.00006004726,0.00004000756,0.0006562056],"category_scores_gemma":[0.00000317488,0.00004994606,0.00001740749,0.00006495212,0.00001201729,0.00004963185,0.00000653009,0.00006993784,0.000194912],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001359974,"about_ca_system_score_gemma":3.316399e-7,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000103312,"about_ca_topic_score_gemma":0.00000164508,"domain_scores_codex":[0.9997219,3.246785e-7,0.00004875661,0.0000548056,0.00002755557,0.0001467017],"domain_scores_gemma":[0.9998722,0.000005443226,0.00000320854,0.000100445,0.000003086453,0.00001561393],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[5.563249e-7,0.00001171441,0.00003077595,0.000007793451,0.00001491354,0.000004721656,0.000057309,0.0001674651,0.828671,0.001001729,0.02140393,0.1486281],"study_design_scores_gemma":[0.0001237823,0.0000171859,0.0001127527,0.000003152565,0.000001997674,0.000008308619,0.00003705163,0.002423557,0.9122704,0.0003996611,0.08444455,0.0001575885],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9159393,0.0008771328,0.0063141,0.00007145027,0.0001358387,0.00007458658,6.595662e-7,0.002685903,0.07390104],"genre_scores_gemma":[0.992692,0.0002503412,0.004680791,0.00004141658,0.00002158853,0.000008200616,1.947411e-7,0.00001679729,0.002288656],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1484705,"threshold_uncertainty_score":0.7184991,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006863654430845409,"score_gpt":0.1506348541495022,"score_spread":0.1437711997186568,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}