{"id":"W2141832440","doi":"10.1109/memsys.1990.110263","title":"CMOS electrothermal microactuators","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":29,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Microactuator; CMOS; Cantilever; Deflection (physics); Fabrication; Materials science; Chip; Optoelectronics; Oxide; Electrical engineering; Composite material; Engineering; Optics; Metallurgy; Physics; Actuator","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000961113,0.0002545313,0.0002025176,0.0001718025,0.0002705617,0.0004513616,0.0006774515,0.0003808453,0.006166107],"category_scores_gemma":[0.0003597426,0.0001817179,0.000126749,0.0002271326,0.0001478738,0.000346075,0.0002382753,0.000292272,0.002648958],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005277812,"about_ca_system_score_gemma":0.0002410188,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006848383,"about_ca_topic_score_gemma":0.001738623,"domain_scores_codex":[0.9996481,0.00001664287,0.00001671529,0.00006996593,0.0002126629,0.0000358594],"domain_scores_gemma":[0.9998604,0.00002314563,0.00001792936,0.00001838518,0.00007283849,0.000007317963],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001279294,0.00004695368,0.0003418509,0.0003447201,0.00001914095,0.0002681891,0.0001194024,0.00151738,0.8655909,0.02113743,0.01863401,0.09185211],"study_design_scores_gemma":[0.00006139594,0.0001901638,0.001060319,0.00005061247,0.00002753188,0.001199132,0.00005815657,0.01302558,0.7959211,0.002194533,0.1861764,0.00003503417],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2142197,0.01620851,0.5053319,0.003480427,0.003437788,0.0005178151,0.004171795,0.01147014,0.2411618],"genre_scores_gemma":[0.6393452,0.004963219,0.2675214,0.001315459,0.0004896095,0.0003760298,0.001560383,0.0002561882,0.08417258],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.006166107,"threshold_uncertainty_score":0.02062768,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006863654430845409,"score_gpt":0.1506348541495022,"score_spread":0.1437711997186568,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}