{"id":"W2142588616","doi":"10.1071/ch14172","title":"Recent Advances Using Guanidinate Ligands for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) Applications","year":2014,"lang":"en","type":"article","venue":"Australian Journal of Chemistry","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":40,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Atomic layer deposition; Chemical vapor deposition; Thin film; Chemistry; Metal; Nanotechnology; Deposition (geology); Catalysis; Substrate (aquarium); Layer (electronics); Nitride; Combustion chemical vapor deposition; Chemical engineering; Materials science; Organic chemistry; Carbon film","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007536781,0.000463345,0.0003382394,0.0004276545,0.0002744793,0.0006604764,0.0004636781,0.0004709402,0.001716145],"category_scores_gemma":[0.0004588595,0.0003781698,0.0002552251,0.0005602562,0.0002361162,0.0007606238,0.0005252012,0.000805687,0.0007902394],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004768853,"about_ca_system_score_gemma":0.0004017282,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007386802,"about_ca_topic_score_gemma":0.001237015,"domain_scores_codex":[0.9997311,0.00004771749,0.00002768469,0.00006779539,0.00009731676,0.00002837478],"domain_scores_gemma":[0.9997248,0.0001034855,0.00005333329,0.00001992365,0.00007633109,0.0000220942],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002349076,0.0001121336,0.001218184,0.01359987,0.00006527795,0.0005945291,0.0007146324,0.00146789,0.6616192,0.009952203,0.005060812,0.3053604],"study_design_scores_gemma":[0.00001831011,0.000546635,0.001672971,0.0003514505,0.0001083581,0.001929553,0.0001584915,0.001391978,0.384988,0.001021636,0.6077565,0.00005624485],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"review","genre_gemma":"empirical","genre_scores_codex":[0.09544932,0.8481901,0.02543813,0.00155585,0.0005343246,0.00008037795,0.0001902191,0.0002996391,0.02826206],"genre_scores_gemma":[0.2402313,0.7002925,0.04510505,0.0008013688,0.0003765234,0.00009930095,0.000418109,0.000128039,0.01254791],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001716145,"threshold_uncertainty_score":0.00574106,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01940649876827901,"score_gpt":0.2638277663701199,"score_spread":0.2444212676018409,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}