{"id":"W2142986851","doi":"10.1109/jmems.2010.2044139","title":"Design, Fabrication, and Characteristics of a MEMS Micromirror With Sidewall Electrodes","year":2010,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":40,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto; University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Fabrication; Materials science; Shadow mask; Silicon on insulator; Wafer; Optics; Surface micromachining; Resistive touchscreen; Deflection (physics); Bulk micromachining; Actuator; Cantilever; Optoelectronics; Comb drive; Electrode; Torsion spring; Torsion (gastropod); Silicon; Electrical engineering; Mechanical engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002735633,0.000369251,0.0002891005,0.0001774354,0.0001841027,0.0003186426,0.00075628,0.0005042302,0.000435538],"category_scores_gemma":[0.0004148115,0.0003414807,0.0003018674,0.00009466199,0.0001602493,0.0003981779,0.000210984,0.0002354667,0.0003960485],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002540341,"about_ca_system_score_gemma":0.0003413904,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003305858,"about_ca_topic_score_gemma":0.0004538844,"domain_scores_codex":[0.9997208,0.00001716831,0.0000200309,0.00005572678,0.0001595917,0.00002675267],"domain_scores_gemma":[0.9996389,0.00007229025,0.00008371321,0.00005066299,0.0001232976,0.00003112553],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003914737,0.00001262923,0.0005331177,0.0000716148,0.000008644232,0.0001071838,0.0000368492,0.0007206146,0.9903526,0.0003573084,0.0001321603,0.007628131],"study_design_scores_gemma":[0.00004322915,0.0008885797,0.004287425,0.00001077709,0.00003162971,0.001211786,0.00002866546,0.0262647,0.9602595,0.0001286102,0.006820791,0.00002436359],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7724203,0.002014044,0.2134617,0.0004046021,0.0002535053,0.0002831444,0.0003735748,0.0009565357,0.009832535],"genre_scores_gemma":[0.805314,0.000588689,0.1897368,0.00007223235,0.00006560179,0.0001081095,0.0002069595,0.00009772132,0.003809931],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00075628,"threshold_uncertainty_score":0.001843154,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006511490242597991,"score_gpt":0.1967358243814916,"score_spread":0.1902243341388936,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}