{"id":"W2143634842","doi":"10.1109/vlsit.2007.4339689","title":"High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processing","year":2007,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":77,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"CMOS; Metal gate; Materials science; Optoelectronics; Electrical engineering; MOSFET; Static random-access memory; Electronic engineering; Transistor; Gate oxide; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001374646,0.0001642523,0.00018618,0.00005414989,0.00009519613,0.00008879381,0.00006641518,0.00005898967,0.00005848131],"category_scores_gemma":[0.00000387165,0.0001185099,0.00001154835,0.0000849465,0.00003679684,0.0003385792,0.00001390506,0.00004407759,0.000006811127],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001608771,"about_ca_system_score_gemma":0.000007279547,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004237589,"about_ca_topic_score_gemma":0.00008273288,"domain_scores_codex":[0.9992825,0.0000017251,0.0001803184,0.0001631323,0.00008841202,0.0002838496],"domain_scores_gemma":[0.9997336,0.00003889094,0.00002974855,0.00009357015,0.00003949683,0.00006469821],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005244312,0.000114929,0.01785799,0.006201914,0.000298148,0.00002269717,0.001759672,0.01138033,0.9257351,0.00548861,0.001205483,0.02941074],"study_design_scores_gemma":[0.001152853,0.0001987072,0.01186268,0.0001075359,0.00004842076,0.00002768953,0.0002740956,0.007953305,0.9749674,0.0001862797,0.002728568,0.0004924219],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9967018,0.0004303313,0.001136549,0.00003579574,0.0002511026,0.0001898864,0.000006251042,0.0002682648,0.0009799956],"genre_scores_gemma":[0.9918859,0.0000433248,0.007650177,0.00006489349,0.0001791156,0.00001886253,0.00001164548,0.00003914109,0.0001069231],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04923238,"threshold_uncertainty_score":0.4832695,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006615510357250913,"score_gpt":0.1924167586666716,"score_spread":0.1858012483094207,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}