{"id":"W2143663321","doi":"10.1109/ats.2010.32","title":"Built-In Self-Test for Capacitive MEMS Using a Charge Control Technique","year":2010,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"CMC Microsystems","keywords":"Capacitive sensing; Microelectromechanical systems; Capacitance; Built-in self-test; Device under test; Electronic engineering; Calibration; Digital control; Charge control; Time domain; Engineering; Materials science; Electrical engineering; Computer science; Optoelectronics; Physics; Scattering parameters; Power (physics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009189726,0.000129309,0.0001694992,0.0001060695,0.00003307058,0.000009982388,0.0001108532,0.0001721438,0.00002125075],"category_scores_gemma":[0.0001052846,0.0001171353,0.00004034826,0.0001082724,0.0000295455,0.0001117206,0.00001327029,0.0002539457,0.000004106907],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003931713,"about_ca_system_score_gemma":0.000008975633,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002455529,"about_ca_topic_score_gemma":0.000187167,"domain_scores_codex":[0.999409,7.419452e-7,0.0001383301,0.0001349021,0.00004233944,0.0002747158],"domain_scores_gemma":[0.9996372,0.0001079586,0.00001807179,0.0001786661,0.00002958761,0.00002847601],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002097282,0.00001789739,0.00008345224,0.00002070268,0.000007252824,0.000002205995,0.00003009779,0.0000611072,0.997406,0.001514308,0.00006799508,0.0007868825],"study_design_scores_gemma":[0.0005724835,0.00003830098,0.00007805724,0.00001726189,0.000006780184,0.00001182996,0.00006296194,0.01668857,0.9743649,0.002334174,0.005617091,0.0002075386],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7121713,0.00006019964,0.2800532,0.00008224059,0.0003020108,0.001377369,0.00004777358,0.00282954,0.003076314],"genre_scores_gemma":[0.9185389,0.00001714995,0.08096632,0.00002196187,0.00004881347,0.0003229386,0.00000114653,0.00003204781,0.00005077972],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2063675,"threshold_uncertainty_score":0.4776637,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009408956877610309,"score_gpt":0.2420596732659258,"score_spread":0.2326507163883154,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}