{"id":"W2144094572","doi":"10.1016/j.tca.2010.07.006","title":"Fabrication, characterization and modeling of single-crystal thin film calorimeter sensors","year":2010,"lang":"en","type":"article","venue":"Thermochimica Acta","topic":"thermodynamics and calorimetric analyses","field":"Chemistry","cited_by":15,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe; Université de Montréal","funders":"","keywords":"Monocrystalline silicon; Wafer; Materials science; Silicon; Silicon on insulator; Nanocrystalline silicon; Hybrid silicon laser; Silicon nitride; Strained silicon; Layer (electronics); Calorimeter (particle physics); Polycrystalline silicon; Amorphous silicon; Optoelectronics; Characterization (materials science); LOCOS; Amorphous solid; Nanotechnology; Crystalline silicon; Optics; Crystallography; Chemistry; Thin-film transistor","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000643451,0.0005834828,0.001088317,0.0004257997,0.0005385767,0.0008752367,0.001931442,0.0007369259,0.001933892],"category_scores_gemma":[0.001456723,0.0007996179,0.0004819689,0.0005229885,0.0003927426,0.0008940554,0.000281772,0.00082206,0.0006721503],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001293271,"about_ca_system_score_gemma":0.00158039,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004679326,"about_ca_topic_score_gemma":0.005525372,"domain_scores_codex":[0.9992901,0.00003815741,0.00002867304,0.0001356611,0.000460804,0.00004654115],"domain_scores_gemma":[0.9992132,0.0001888784,0.00009257352,0.0001194219,0.0003609641,0.00002492823],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002657401,0.0001554654,0.001519302,0.0005897445,0.00007613131,0.0001909312,0.0002003214,0.09169245,0.874946,0.003158337,0.002240131,0.02496542],"study_design_scores_gemma":[0.0000135264,0.0001245197,0.001038643,0.000008559873,0.00002172544,0.00006062446,0.00002912413,0.2719414,0.7234642,0.0002246033,0.003046741,0.00002633812],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5304982,0.001570802,0.4497807,0.000740515,0.0002921229,0.0008603816,0.004413156,0.003642241,0.008201961],"genre_scores_gemma":[0.7866637,0.001242242,0.2033094,0.0000770047,0.00003248895,0.0007982234,0.001269423,0.0002729877,0.006334703],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004679326,"threshold_uncertainty_score":0.00938338,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01728791793622062,"score_gpt":0.2256204306135826,"score_spread":0.208332512677362,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}