{"id":"W2144693095","doi":"10.3390/s7102062","title":"Quantitative Boundary Support Characterization for Cantilever MEMS","year":2007,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Microfabrication; Microscale chemistry; Microsystem; Microelectromechanical systems; Cantilever; Fabrication; Mechanical engineering; Computer science; Materials science; Nanotechnology; Engineering; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008289477,0.00009010246,0.0001007346,0.00007082588,0.00004961439,0.00001048276,0.00004831566,0.00007240373,0.00001947886],"category_scores_gemma":[0.00003527909,0.00008871891,0.00003174752,0.00008380068,0.00003838901,0.00008945619,0.0000078572,0.00006781691,0.00002303212],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003365327,"about_ca_system_score_gemma":0.000007086807,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003205461,"about_ca_topic_score_gemma":0.00002181539,"domain_scores_codex":[0.999495,6.91103e-7,0.000128624,0.00009979607,0.0000571357,0.0002187874],"domain_scores_gemma":[0.9997745,0.00004182832,0.00002255012,0.0001015801,0.00003298164,0.00002660632],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000027535,0.000007754903,0.00006556101,0.00003991885,0.00002486294,0.000009746255,0.0003004123,0.0004450261,0.9808236,0.001506003,0.0004740125,0.01627562],"study_design_scores_gemma":[0.0003196289,0.000125767,0.007735741,0.00001738544,0.00001191233,0.00000806264,0.0005813433,0.001955583,0.7443367,0.0009075169,0.2436989,0.0003014225],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9633482,0.00002951252,0.03435988,0.00003466664,0.0004258573,0.0001681704,0.00003862105,0.0005463628,0.001048696],"genre_scores_gemma":[0.9896053,0.00009361386,0.009185701,0.00003715624,0.00006752291,0.00001154169,0.00007348352,0.00003952137,0.0008861664],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2432249,"threshold_uncertainty_score":0.3617852,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01667812520586975,"score_gpt":0.2661196012171906,"score_spread":0.2494414760113209,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}