{"id":"W2144693095","doi":"10.3390/s7102062","title":"Quantitative Boundary Support Characterization for Cantilever MEMS","year":2007,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Microfabrication; Microscale chemistry; Microsystem; Microelectromechanical systems; Cantilever; Fabrication; Mechanical engineering; Computer science; Materials science; Nanotechnology; Engineering; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005465351,0.0003934698,0.0002856587,0.0007998339,0.0002772567,0.0003563313,0.0004516052,0.000582717,0.001475433],"category_scores_gemma":[0.002014313,0.0001953023,0.0001158917,0.0002796607,0.0005198112,0.0006807532,0.0004155209,0.0002326329,0.000275097],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002579078,"about_ca_system_score_gemma":0.0001407464,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004082149,"about_ca_topic_score_gemma":0.0005163786,"domain_scores_codex":[0.9993225,0.00006584036,0.00002404603,0.00006492515,0.000490462,0.00003215199],"domain_scores_gemma":[0.9991027,0.0003721894,0.0001170665,0.0001327113,0.0002465291,0.00002880595],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005484283,0.00001794483,0.001098737,0.00008516863,0.000004412024,0.00004800482,0.00006144379,0.003717906,0.9762288,0.0008920507,0.00009174528,0.01769889],"study_design_scores_gemma":[0.00001243033,0.0002253269,0.009462819,0.00002105884,0.000007237623,0.0001902951,0.0000975757,0.1233386,0.8636901,0.001232524,0.001690106,0.00003193334],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7422305,0.0009584179,0.2531418,0.00006739098,0.00002211287,0.00007343321,0.0003382353,0.0004813276,0.002686812],"genre_scores_gemma":[0.9622341,0.0001859487,0.03652531,0.00001185174,0.000007860144,0.00008326139,0.0002753261,0.00003373419,0.0006425418],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001475433,"threshold_uncertainty_score":0.004935801,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01667812520586975,"score_gpt":0.2661196012171906,"score_spread":0.2494414760113209,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}