{"id":"W2144736372","doi":"10.1109/sensor.1997.613668","title":"A micromachined angled Hall magnetic field sensor using novel in-cavity patterning","year":2002,"lang":"en","type":"article","venue":"","topic":"Magnetic Field Sensors Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Etching (microfabrication); Materials science; Hall effect sensor; Silicon; Fabrication; Wafer; Hall effect; Optoelectronics; Surface micromachining; Magnetic field; Shadow mask; Microelectromechanical systems; Bulk micromachining; Optics; Nanotechnology; Electrical engineering; Magnet; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002193237,0.0002694586,0.0003596832,0.0002211807,0.000216805,0.0004763957,0.0006381752,0.000357783,0.001164677],"category_scores_gemma":[0.000346759,0.0003073361,0.0001210871,0.0001527568,0.0003550038,0.0004414593,0.0003735995,0.0004257066,0.0003173635],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000272316,"about_ca_system_score_gemma":0.0003588197,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003904328,"about_ca_topic_score_gemma":0.0008310913,"domain_scores_codex":[0.999703,0.00002194479,0.00001728016,0.00006873301,0.0001622249,0.00002683757],"domain_scores_gemma":[0.999642,0.00008790299,0.00007238671,0.00005940342,0.00008757498,0.00005076142],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003411974,0.00001924613,0.0002321441,0.0000571226,0.00000331626,0.00007203613,0.00003217374,0.0002016736,0.9890037,0.0006094024,0.0002495101,0.009485664],"study_design_scores_gemma":[0.00001963181,0.0001659678,0.001291596,0.000004749035,0.000008304207,0.0003881565,0.00002583234,0.004893433,0.986526,0.0001576118,0.006497483,0.00002118262],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6872904,0.001565331,0.2894135,0.0006944835,0.00121503,0.0004005919,0.000680296,0.002576365,0.01616404],"genre_scores_gemma":[0.6940205,0.0004886042,0.2988105,0.0001302542,0.000128592,0.00009325483,0.0001712692,0.00004645487,0.006110622],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001164677,"threshold_uncertainty_score":0.003896236,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02034957577287524,"score_gpt":0.2100471843388253,"score_spread":0.1896976085659501,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}