{"id":"W2144839634","doi":"10.1109/ccece.2007.243","title":"Characterization of Low Temperature P-Type Hydrogenated Microcrystalline Silicon Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition","year":2007,"lang":"en","type":"article","venue":"","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Simon Fraser University","keywords":"Plasma-enhanced chemical vapor deposition; Microcrystalline; Analytical Chemistry (journal); Chemical vapor deposition; Materials science; Thin film; Crystallite; Amorphous solid; Chemistry; Nanotechnology; Crystallography; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006489504,0.0001553968,0.0001578168,0.0001482187,0.0001258776,0.000211828,0.000260411,0.0002679773,0.001249138],"category_scores_gemma":[0.0002070473,0.0001587138,0.0001116998,0.0002274416,0.0001433219,0.0001561167,0.00005931711,0.0002129677,0.0002751896],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002353698,"about_ca_system_score_gemma":0.000134771,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00137646,"about_ca_topic_score_gemma":0.002256995,"domain_scores_codex":[0.9999446,0.000002545737,0.00000271931,0.00001545043,0.00002428987,0.00001041009],"domain_scores_gemma":[0.9998679,0.00004362087,0.00002174952,0.00001420233,0.00004270857,0.000009819495],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000159056,0.000002936506,0.0002878784,0.00002913142,0.000004067468,0.0000606331,0.00001510229,0.00006547341,0.9987181,0.00002020904,0.00004547394,0.0007350606],"study_design_scores_gemma":[0.000003898228,0.00006884495,0.008790944,0.000003036603,0.000008457514,0.0001104247,0.00002690326,0.0007710101,0.989337,0.000009780862,0.0008662922,0.000003394969],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9942179,0.0005479988,0.002876595,0.00004745968,0.00001458975,0.00001692376,0.0005631912,0.00007242495,0.00164287],"genre_scores_gemma":[0.9911053,0.0006472389,0.005166905,0.00002765333,0.000007398492,0.00002997553,0.0005758702,0.00003505089,0.00240452],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00137646,"threshold_uncertainty_score":0.004178762,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002983066805065512,"score_gpt":0.1785434890934276,"score_spread":0.1755604222883621,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}