{"id":"W2145380776","doi":"10.1017/s1431927604040711","title":"The Impact of Charging on Low-Energy Electron Beam Lithography","year":2004,"lang":"en","type":"article","venue":"Microscopy and Microanalysis","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Electron-beam lithography; Lithography; Extreme ultraviolet lithography; Materials science; X-ray lithography; Next-generation lithography; Voltage; Resist; Maskless lithography; Acceleration voltage; Optoelectronics; Cathode ray; Distortion (music); Optics; Electron; Nanotechnology; CMOS; Physics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001320433,0.0002343647,0.0002746268,0.0003156008,0.0001735924,0.00004558016,0.0001972443,0.00006854079,0.000008780371],"category_scores_gemma":[0.00000524325,0.0001689903,0.0003267565,0.0006921459,0.0001375043,0.00008009833,0.00002599334,0.0001469029,0.000001247856],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008270353,"about_ca_system_score_gemma":0.00001376707,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002067553,"about_ca_topic_score_gemma":0.00001636992,"domain_scores_codex":[0.9990249,0.00001717738,0.0002800674,0.0002136142,0.00009961324,0.0003646686],"domain_scores_gemma":[0.9994339,0.00003756025,0.00007285622,0.0003590214,0.00003777501,0.00005892633],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004028344,0.00005981768,0.001028245,0.00002248687,0.0006803422,0.000001740062,0.0001183649,0.003464805,0.9897919,0.0005310628,0.0002085733,0.004052434],"study_design_scores_gemma":[0.0002460632,0.0001361483,0.0008278579,0.00005852927,0.00008324011,0.000004054625,0.00002697209,0.0001011318,0.9953312,0.001726958,0.001263432,0.0001943926],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9695094,0.007048477,0.0223351,0.00001375993,0.00004564826,0.0001162708,0.00003443726,0.0001890739,0.0007078919],"genre_scores_gemma":[0.9931308,0.00493997,0.001784392,0.00002308487,0.0000211431,0.00002441653,0.00001326972,0.00003311595,0.00002978244],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02362149,"threshold_uncertainty_score":0.6891223,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003332271820185367,"score_gpt":0.2524192883439059,"score_spread":0.2490870165237205,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}