{"id":"W2145679300","doi":"10.1557/proc-0989-a04-04","title":"High Quality a-Ge:H Films and Devices Through Enhanced Plasma Chemistry","year":2007,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; High-resolution transmission electron microscopy; Plasma-enhanced chemical vapor deposition; Substrate (aquarium); Plasma; Optoelectronics; Layer (electronics); Electrode; Thin film; Analytical Chemistry (journal); Nanotechnology; Silicon; Transmission electron microscopy","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001866859,0.0002850012,0.0002156433,0.0002160378,0.0002666395,0.0006997494,0.0003493861,0.0004356104,0.001973956],"category_scores_gemma":[0.0001768696,0.0002595079,0.0001392505,0.000157365,0.0003794185,0.0007337679,0.0004327146,0.0004998809,0.0004879111],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002817916,"about_ca_system_score_gemma":0.0001697364,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004526346,"about_ca_topic_score_gemma":0.0009166067,"domain_scores_codex":[0.9999235,0.000008462797,0.000002912162,0.00001298536,0.00003442942,0.00001773287],"domain_scores_gemma":[0.9999462,0.00001507006,0.000010408,0.000007682189,0.00001052038,0.00001016103],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000916306,0.00002405092,0.0001486512,0.0001031318,0.00001181642,0.0001285768,0.00009335494,0.0002560182,0.9882409,0.005772465,0.0009542999,0.004175043],"study_design_scores_gemma":[0.00006432046,0.0001318394,0.0008351417,0.000008195995,0.000008931557,0.0002621072,0.00006318494,0.001699342,0.986784,0.001199719,0.00892962,0.0000136058],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9459895,0.003165867,0.02138746,0.001015185,0.000266402,0.0001273202,0.0002926727,0.0006030814,0.02715249],"genre_scores_gemma":[0.9733788,0.00115788,0.0154211,0.0001278475,0.00005853144,0.00003703351,0.0001382209,0.0001119858,0.009568587],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001973956,"threshold_uncertainty_score":0.006603539,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0121509753457347,"score_gpt":0.2346006442405142,"score_spread":0.2224496688947795,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}