{"id":"W2145679300","doi":"10.1557/proc-0989-a04-04","title":"High Quality a-Ge:H Films and Devices Through Enhanced Plasma Chemistry","year":2007,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; High-resolution transmission electron microscopy; Plasma-enhanced chemical vapor deposition; Substrate (aquarium); Plasma; Optoelectronics; Layer (electronics); Electrode; Thin film; Analytical Chemistry (journal); Nanotechnology; Silicon; Transmission electron microscopy","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002123393,0.0002245913,0.0002421645,0.00003631927,0.00007345204,0.00005254713,0.0002280143,0.0002509826,0.00004423182],"category_scores_gemma":[0.00007439685,0.0002305528,0.00003788163,0.0002133717,0.0001195658,0.0003084279,0.0000429347,0.0002967245,0.00001403522],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000644486,"about_ca_system_score_gemma":0.00000566253,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003015722,"about_ca_topic_score_gemma":0.0000132312,"domain_scores_codex":[0.9988679,9.140404e-7,0.0002899736,0.0002828396,0.0001808056,0.0003776032],"domain_scores_gemma":[0.9996784,0.00004169169,0.00005238863,0.0001155856,0.00005563748,0.00005632171],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002408618,0.00001679822,0.001069581,0.0007662598,0.00004228424,0.000003004015,0.001565406,0.00003467166,0.9908596,0.00154338,0.001265481,0.002809505],"study_design_scores_gemma":[0.0003145886,0.0000166751,0.005279337,0.00005361581,0.00001484765,0.000008358379,0.00134915,0.0001028788,0.9880789,0.0007309941,0.00373563,0.000315009],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.984045,0.0003202098,0.0007312145,0.00009616424,0.0001446996,0.0001071407,0.000007189725,0.001916353,0.01263201],"genre_scores_gemma":[0.9848052,0.00006397517,0.01483081,0.00003870355,0.0000434246,0.00001572556,0.000003063425,0.000038349,0.0001608119],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01409959,"threshold_uncertainty_score":0.940167,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0121509753457347,"score_gpt":0.2346006442405142,"score_spread":0.2224496688947795,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}