{"id":"W2146029244","doi":"10.1109/iitc.1998.704912","title":"Modelling microstructure development in trench-interconnect structures","year":2002,"lang":"en","type":"article","venue":"","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Trench; Copper interconnect; Materials science; Microstructure; Aspect ratio (aeronautics); Texture (cosmology); Energy minimization; Surface energy; Grain size; Interconnection; Anisotropy; Surface finish; Composite material; Optics; Layer (electronics); Computer science; Computational chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001231453,0.0002892565,0.0002514374,0.0002220193,0.0001744542,0.0004927534,0.0005802971,0.000785255,0.001200211],"category_scores_gemma":[0.0006053945,0.0003614896,0.0002851939,0.0002631957,0.0002973741,0.0003169729,0.0002500644,0.0002942639,0.0001844197],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008898281,"about_ca_system_score_gemma":0.0006643976,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.01052504,"about_ca_topic_score_gemma":0.01313789,"domain_scores_codex":[0.9999319,0.00001198799,0.000002294962,0.00001579401,0.00002180342,0.00001618658],"domain_scores_gemma":[0.9997948,0.00009884011,0.00004319587,0.00001631753,0.00003434045,0.00001255916],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001038086,0.000007349169,0.000697917,0.00001928593,0.000005122441,0.00004965221,0.00001501097,0.9909655,0.006293591,0.0006771838,0.00003870608,0.001220253],"study_design_scores_gemma":[0.000002968926,0.00001444002,0.0008545197,0.00000206903,0.000003196504,0.0000176002,0.000006643153,0.997145,0.001356755,0.0002948574,0.0002987515,0.000003121495],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9244651,0.0004399595,0.06713699,0.0001035113,0.00001890173,0.0000539342,0.0004684027,0.0002997495,0.007013427],"genre_scores_gemma":[0.9808313,0.000332588,0.01562968,0.00001392856,0.000003764944,0.00004638627,0.0002206678,0.00005814569,0.002863443],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01052504,"threshold_uncertainty_score":0.02092755,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02900234034529382,"score_gpt":0.2321243856245324,"score_spread":0.2031220452792386,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}