{"id":"W2146992540","doi":"10.1007/s11664-007-0289-z","title":"Influence of Ta-based Diffusion Barriers on the Microstructure of Copper Thin Films","year":2007,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":10,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of British Columbia","funders":"Deutsche Forschungsgemeinschaft; Deutscher Akademischer Austauschdienst","keywords":"Microstructure; Copper; Materials science; Electroplating; Diffusion barrier; Recrystallization (geology); Thin film; Copper interconnect; Interconnection; Diffusion; Layer (electronics); Physical vapor deposition; Barrier layer; Metallurgy; Composite material; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001293402,0.000168846,0.000221301,0.0001468088,0.0002994507,0.0005508066,0.000219661,0.0002132382,0.001118244],"category_scores_gemma":[0.0005908005,0.0002592304,0.00009126386,0.0001774429,0.0002387877,0.000330628,0.0001332921,0.0003353612,0.0001401069],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004026848,"about_ca_system_score_gemma":0.0002540156,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002474994,"about_ca_topic_score_gemma":0.002948343,"domain_scores_codex":[0.9999249,0.000009253716,0.000004615362,0.0000162343,0.00001953834,0.00002542597],"domain_scores_gemma":[0.9996939,0.0001134659,0.00007341182,0.00002570821,0.00006945111,0.0000240971],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003005893,0.00001796965,0.000343687,0.00007483628,0.00001132274,0.00008751284,0.00006584155,0.0003983725,0.9973678,0.0002922483,0.00009860854,0.0009412986],"study_design_scores_gemma":[0.00002799701,0.0001515944,0.003032041,0.00001135122,0.00002664062,0.00006197616,0.00007672289,0.002765113,0.9929061,0.00004731103,0.000886353,0.000006788406],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981982,0.0006339268,0.0003539631,0.00003909268,0.00001979814,0.000003807642,0.00006154859,0.000017624,0.0006721033],"genre_scores_gemma":[0.9989727,0.0003165045,0.0003049436,0.000009798202,0.000005475037,0.000004692547,0.0000431222,0.00001438646,0.0003283881],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002474994,"threshold_uncertainty_score":0.004921257,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005065075584577547,"score_gpt":0.2387606544963843,"score_spread":0.2336955789118067,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}