{"id":"W2147133519","doi":"10.1557/proc-814-i2.4/a3.4","title":"100-nm Channel Length a-Si:H Vertical Thin Film Transistors","year":2004,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Thin-film transistor; Optoelectronics; Transistor; Subthreshold slope; Amorphous silicon; Channel (broadcasting); Reactive-ion etching; Planar; Etching (microfabrication); Silicon; Engineering physics; Nanotechnology; Electrical engineering; Threshold voltage; Crystalline silicon; Voltage; Computer science; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000100197,0.0002360633,0.0002193724,0.0002047611,0.0003861118,0.0005489361,0.0006690861,0.0006188151,0.002597964],"category_scores_gemma":[0.0002596284,0.0001897681,0.0001212238,0.0002423257,0.0002472633,0.0004889265,0.0002404365,0.0003651094,0.0006462772],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000526662,"about_ca_system_score_gemma":0.000321822,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001921697,"about_ca_topic_score_gemma":0.007470872,"domain_scores_codex":[0.9998963,0.000005630751,0.000005002518,0.00002597745,0.00003997931,0.00002716739],"domain_scores_gemma":[0.99983,0.00004966349,0.00002296906,0.00001610559,0.00004919122,0.00003195782],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001243053,0.00004839325,0.0003494484,0.0001231739,0.00001997907,0.0001432848,0.00005621526,0.000275624,0.9916905,0.001060657,0.00179422,0.004314241],"study_design_scores_gemma":[0.00007035061,0.0004557105,0.004070824,0.00002747801,0.00004226251,0.0002387307,0.0001916019,0.007223965,0.9760746,0.0007342695,0.01084791,0.00002225195],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9724144,0.00192879,0.004851361,0.0007132096,0.0004530419,0.00005120106,0.001285928,0.0005843774,0.01771769],"genre_scores_gemma":[0.9851275,0.0007009814,0.005823485,0.0001290002,0.00007648313,0.00004169756,0.0004347757,0.00004646902,0.007619578],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002597964,"threshold_uncertainty_score":0.008691013,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01208327874425251,"score_gpt":0.1966873837582007,"score_spread":0.1846041050139482,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}