{"id":"W2147437703","doi":"10.1088/0960-1317/20/5/055001","title":"Straight SU-8 pins","year":2010,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University and Génome Québec Innovation Centre","funders":"","keywords":"Fabrication; Wafer; Materials science; Cartridge; Clamping; Silicon; Nanotechnology; Composite material; Optoelectronics; Mechanical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00017588,0.0001225987,0.0001708521,0.0002641759,0.00002520934,0.00005028662,0.0001345374,0.00007894231,0.00003931489],"category_scores_gemma":[0.000008559949,0.0001151144,0.00008199922,0.0001472944,0.00001112392,0.0001170132,0.00001571032,0.000378086,0.000001334339],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001086886,"about_ca_system_score_gemma":0.000009196602,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":5.212665e-7,"about_ca_topic_score_gemma":0.000001107656,"domain_scores_codex":[0.999419,0.000003337685,0.0002821072,0.00006400848,0.00007246186,0.0001590545],"domain_scores_gemma":[0.9996511,0.00001427644,0.00005773719,0.000105175,0.00006573118,0.000105965],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001451161,0.000009145974,0.00001884456,0.00003015981,0.00002552847,0.000007084232,0.00005693582,0.00003443908,0.9890434,0.002297472,0.000755313,0.007720199],"study_design_scores_gemma":[0.0004975969,0.0000981413,0.0006132436,0.0000879683,0.0000419807,0.001236005,0.00004825089,0.004083049,0.7429625,0.000569234,0.2493991,0.00036291],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8906643,0.002055541,0.1051646,0.0000857779,0.001215715,0.00008885167,0.00001709661,0.0002028569,0.0005053461],"genre_scores_gemma":[0.9713755,0.0008884793,0.02752167,0.00002342896,0.0001256359,0.000001246849,0.00000113357,0.00003215241,0.00003077222],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2486438,"threshold_uncertainty_score":0.4694231,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.001922523036979331,"score_gpt":0.1668157803402112,"score_spread":0.1648932573032319,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}