{"id":"W2147437703","doi":"10.1088/0960-1317/20/5/055001","title":"Straight SU-8 pins","year":2010,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University and Génome Québec Innovation Centre","funders":"","keywords":"Fabrication; Wafer; Materials science; Cartridge; Clamping; Silicon; Nanotechnology; Composite material; Optoelectronics; Mechanical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003309084,0.001162553,0.000394624,0.0006531769,0.0003206744,0.0006600816,0.001184199,0.001041668,0.01632942],"category_scores_gemma":[0.0007982677,0.0006189452,0.0004240725,0.0003449444,0.0003124514,0.0007197761,0.0006175055,0.0008801139,0.0168821],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002650435,"about_ca_system_score_gemma":0.0002926482,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001528438,"about_ca_topic_score_gemma":0.0002688115,"domain_scores_codex":[0.9990985,0.00004532,0.00008031029,0.0002415091,0.0004070927,0.0001273308],"domain_scores_gemma":[0.9994605,0.0000728038,0.0001204497,0.0001627547,0.0001386547,0.00004473402],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002215218,0.0001021325,0.0004641562,0.0004428047,0.00002406316,0.0005129334,0.0001080217,0.0009040775,0.8952128,0.005604949,0.01198547,0.08441712],"study_design_scores_gemma":[0.00005126599,0.000528792,0.001043784,0.00002899193,0.00002406054,0.0007369476,0.00003264811,0.002826929,0.8343321,0.001042757,0.1593028,0.00004891192],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3153115,0.005898678,0.4518223,0.0009069088,0.005277332,0.003456302,0.01274097,0.0255078,0.1790783],"genre_scores_gemma":[0.4224137,0.00234227,0.4428183,0.0007902678,0.000225458,0.001972948,0.01218058,0.001225087,0.1160315],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.01632942,"threshold_uncertainty_score":0.0546273,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.001922523036979331,"score_gpt":0.1668157803402112,"score_spread":0.1648932573032319,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}