{"id":"W2149474387","doi":"10.1177/1045389x06061770","title":"Performance Characterization of In-plane Electro-thermally Driven Linear Microactuators","year":2006,"lang":"en","type":"article","venue":"Journal of Intelligent Material Systems and Structures","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"Queen's University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microactuator; Microsystem; Actuator; Microelectromechanical systems; Surface micromachining; Materials science; Precision engineering; Displacement (psychology); Mechanical engineering; Fabrication; Engineering; Optoelectronics; Electrical engineering; Nanotechnology; Miniaturization","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001988317,0.0003150573,0.0002488925,0.0002598396,0.0001534917,0.0002286651,0.0002749701,0.0002651696,0.0006444855],"category_scores_gemma":[0.0005583527,0.0001743512,0.0001599713,0.0001979802,0.000178921,0.0002346565,0.0001459934,0.000192773,0.0002133236],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000163185,"about_ca_system_score_gemma":0.0001128576,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003343611,"about_ca_topic_score_gemma":0.0003831511,"domain_scores_codex":[0.9997332,0.00002384181,0.00001719884,0.00004770658,0.000136528,0.00004158899],"domain_scores_gemma":[0.9995782,0.0001103846,0.00009509593,0.00004384572,0.0001435162,0.00002903168],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003848711,0.00001536609,0.0003841714,0.00003169688,0.000004785896,0.00003231033,0.00004277253,0.0005150666,0.9970098,0.00001725535,0.0000255192,0.001882802],"study_design_scores_gemma":[0.00000285793,0.0002832865,0.005601052,0.000003056399,0.000008854733,0.00006837813,0.00003810784,0.004961694,0.9887017,0.000006436619,0.0003185686,0.000006114351],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9960069,0.0002471816,0.003013228,0.00002176951,0.00001089137,0.000009832576,0.00007107536,0.00004752863,0.0005715232],"genre_scores_gemma":[0.9968257,0.0001713511,0.002059849,0.00001243905,0.000009074896,0.00001520942,0.000071,0.00001418764,0.0008211891],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006444855,"threshold_uncertainty_score":0.00215596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004477840298704197,"score_gpt":0.1919727051613057,"score_spread":0.1874948648626015,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}