{"id":"W2151202345","doi":"10.1109/sensor.2009.5285940","title":"Planar sacrificial surface micromachining by nickel silicide","year":2009,"lang":"en","type":"article","venue":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Surface micromachining; Chemical-mechanical planarization; Silicide; Materials science; Layer (electronics); Fabrication; Silicon; Substrate (aquarium); Optoelectronics; Polishing; Nanotechnology; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008508468,0.0002793978,0.0002014539,0.000162482,0.0001614148,0.0002626201,0.0004725575,0.0001869803,0.00083216],"category_scores_gemma":[0.0001853553,0.0002665097,0.0001857131,0.0001561597,0.0003330396,0.0002811663,0.0004768723,0.0003476421,0.0004765642],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003210797,"about_ca_system_score_gemma":0.0003112891,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006367572,"about_ca_topic_score_gemma":0.001481628,"domain_scores_codex":[0.9997607,0.000008686057,0.00001221189,0.00007003624,0.0001146496,0.00003373331],"domain_scores_gemma":[0.9998962,0.00001616537,0.00002698346,0.00003205034,0.00001923181,0.0000094892],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001396787,0.000004488161,0.000146375,0.00005261415,0.000005705405,0.00005355939,0.0000447569,0.0005003351,0.9881614,0.0008649181,0.0001843182,0.009967629],"study_design_scores_gemma":[0.00001172914,0.0001019175,0.0014512,0.000004757698,0.00001134061,0.0003295359,0.00003704675,0.004313747,0.9793005,0.000331488,0.01408984,0.00001694284],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6978491,0.003712248,0.2695363,0.0004099816,0.0003368685,0.0001459181,0.0003321558,0.003327323,0.02435015],"genre_scores_gemma":[0.8731025,0.001029696,0.1197502,0.00006645811,0.00003723158,0.00005065935,0.0002469551,0.00009313185,0.005623025],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00083216,"threshold_uncertainty_score":0.002783895,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008606500276818915,"score_gpt":0.244801943758016,"score_spread":0.2361954434811971,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}