{"id":"W2151333774","doi":"10.1109/tmech.2011.2159732","title":"A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process","year":2011,"lang":"en","type":"article","venue":"IEEE/ASME Transactions on Mechatronics","topic":"Ultrasonics and Acoustic Wave Propagation","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitive micromachined ultrasonic transducers; Materials science; Transducer; Silicon nitride; Ultrasonic sensor; Fabrication; Capacitive sensing; Surface micromachining; Microelectromechanical systems; Optoelectronics; Phased array; Center frequency; Piezoelectricity; Silicon; Acoustics; Optics; Electrical engineering; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002072431,0.0003178813,0.0003746072,0.0002994213,0.000294809,0.0003285028,0.0006367353,0.0006486594,0.001045972],"category_scores_gemma":[0.0005432871,0.0004020973,0.0001792905,0.000314575,0.0003046081,0.0005504251,0.0004045046,0.0005224207,0.0003882036],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005717937,"about_ca_system_score_gemma":0.0006934729,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001064557,"about_ca_topic_score_gemma":0.00220047,"domain_scores_codex":[0.999688,0.00001534554,0.0000141489,0.0000837535,0.0001640798,0.00003457057],"domain_scores_gemma":[0.9998036,0.00005474585,0.0000401766,0.00003037786,0.00004985865,0.00002135231],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001728795,0.000008811758,0.0001235705,0.00002154372,0.000001687721,0.00004370838,0.00002454286,0.0005897313,0.9933237,0.0004253679,0.0001231991,0.005296836],"study_design_scores_gemma":[0.00001414425,0.000193594,0.001680257,0.000004417154,0.000009417449,0.0005412333,0.00002900751,0.01763519,0.973079,0.0001582705,0.006632622,0.0000228326],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5796502,0.0006803537,0.4066963,0.0004892611,0.0003623819,0.0001994637,0.0005863187,0.001935705,0.009399875],"genre_scores_gemma":[0.6000216,0.0002003428,0.3957286,0.000113728,0.0000438657,0.0001309577,0.0002266382,0.00004438311,0.003489984],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001064557,"threshold_uncertainty_score":0.004148602,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00971612363625406,"score_gpt":0.1931534944323848,"score_spread":0.1834373707961308,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}