{"id":"W2151443045","doi":"10.1109/ccece.2007.45","title":"Low-Cost Surface Micromachined Pirani Pressure Sensor with Atmospheric Pressure Range","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Pressure sensor; Resistor; Optoelectronics; Heat sink; Surface roughness; Atmospheric pressure; Nanometre; Pressure measurement; Electrical engineering; Composite material; Mechanical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004828603,0.0004934893,0.0006600816,0.0002664118,0.0002305254,0.0003254262,0.001008201,0.0006657157,0.001293748],"category_scores_gemma":[0.0007350059,0.0004570076,0.0002231609,0.0003207297,0.0003507001,0.0008028081,0.0004780598,0.0009763318,0.000733833],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002381963,"about_ca_system_score_gemma":0.0002703039,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003211988,"about_ca_topic_score_gemma":0.0007508082,"domain_scores_codex":[0.9990672,0.00005874355,0.00003122299,0.000217344,0.000580189,0.00004526014],"domain_scores_gemma":[0.9994991,0.0001305521,0.0001044414,0.00005833384,0.0001654793,0.00004201974],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002643608,0.00001044533,0.0001551468,0.00008740541,0.000003944759,0.00005407679,0.00001705211,0.00007509164,0.9929603,0.000139306,0.0002054116,0.006265532],"study_design_scores_gemma":[0.0000202333,0.0004205795,0.002943418,0.000005619774,0.00002372933,0.001219372,0.00001839024,0.003393992,0.985999,0.00009107075,0.005834269,0.00003032397],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6399766,0.006449221,0.3331118,0.00105937,0.0008835685,0.0003282354,0.0009185912,0.003838773,0.01343381],"genre_scores_gemma":[0.6535773,0.001233943,0.3338516,0.0003202379,0.0002176529,0.0001831987,0.0005041228,0.00009653139,0.01001533],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001293748,"threshold_uncertainty_score":0.004328012,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004666383145799064,"score_gpt":0.2026008971976533,"score_spread":0.1979345140518542,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}