{"id":"W2152170048","doi":"10.1002/cjce.22263","title":"Numerical simulation of multiple polysilicon CVD reactors connected in series using CFD method","year":2015,"lang":"en","type":"article","venue":"The Canadian Journal of Chemical Engineering","topic":"Catalytic Processes in Materials Science","field":"Materials Science","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Key Research and Development Program of China; National Natural Science Foundation of China","keywords":"Computational fluid dynamics; Chemical vapor deposition; Process (computing); Materials science; Deposition (geology); Chlorine; Nuclear engineering; Process engineering; Analytical Chemistry (journal); Chemical engineering; Mechanics; Chemistry; Computer science; Optoelectronics; Engineering; Physics; Chromatography","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001054793,0.000103011,0.000269341,0.000142221,0.00002361616,0.00005083017,0.0003881262,0.00006257296,0.00002699899],"category_scores_gemma":[0.003526897,0.00008074098,0.00003862908,0.000350014,0.0001001258,0.0003136533,0.00002467666,0.0001461576,0.000001760778],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003123569,"about_ca_system_score_gemma":0.0006282417,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003632782,"about_ca_topic_score_gemma":0.0001599263,"domain_scores_codex":[0.9988979,0.00003861585,0.0004563044,0.0001021328,0.0002508629,0.0002542523],"domain_scores_gemma":[0.9988541,0.0002953512,0.0002155391,0.0001498404,0.0001931109,0.0002920487],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001700789,0.000002738668,0.00009195841,0.00001191198,0.000001948489,0.000006541157,0.0003554206,0.3822457,0.617208,0.0000355289,0.000002183179,0.00002106405],"study_design_scores_gemma":[0.0001967051,0.00001674798,0.00005700822,0.00006138458,0.000009135199,0.0001014194,0.00003756564,0.2013537,0.797863,0.0002014208,0.00002293493,0.00007903136],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.990095,0.00008496916,0.009251985,0.0001006927,0.0003905409,0.00005134197,0.00000614234,0.000007894403,0.00001149792],"genre_scores_gemma":[0.9914061,1.829254e-7,0.008469243,0.00001490251,0.00009508654,6.402182e-7,7.178943e-7,0.00001162432,0.000001463858],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.180892,"threshold_uncertainty_score":0.5491703,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03010422069407663,"score_gpt":0.2707690103564137,"score_spread":0.2406647896623371,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}