{"id":"W2152352529","doi":"10.1117/12.569405","title":"Calibrating grayscale direct write bimetallic photomasks to create 3D photoresist structures","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced Memory and Neural Computing","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Grayscale; Photomask; Photoresist; Computer science; Computer graphics (images); Artificial intelligence; Pixel; Materials science; Resist; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004046139,0.0004476315,0.0001670542,0.000338079,0.0001757923,0.0003657408,0.0005039592,0.0003289711,0.002750927],"category_scores_gemma":[0.001193054,0.0003513823,0.0001603576,0.0002382167,0.0002608849,0.0003015855,0.0003596722,0.0004071972,0.0006048714],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004370229,"about_ca_system_score_gemma":0.0001686351,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000387984,"about_ca_topic_score_gemma":0.001155243,"domain_scores_codex":[0.9995582,0.00003449863,0.00002711772,0.0001133752,0.0002288825,0.00003794321],"domain_scores_gemma":[0.999308,0.0001815568,0.0001030615,0.0002002573,0.0001803421,0.00002673497],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001760059,0.000025539,0.0004644021,0.00003012767,0.000004844719,0.00003439539,0.00004763919,0.0008016193,0.9908733,0.0001930479,0.0001100543,0.007397357],"study_design_scores_gemma":[0.000002935687,0.00006284574,0.001782269,0.000001302963,0.000003446026,0.00006311747,0.00001416101,0.003211709,0.9938396,0.00005302838,0.000960257,0.000005337147],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8970049,0.0002617194,0.09537702,0.00009100328,0.0001167367,0.0002397384,0.0003296122,0.001308787,0.005270434],"genre_scores_gemma":[0.8399001,0.000279643,0.1548159,0.00005426252,0.00001153061,0.0002248156,0.0002939781,0.0002324893,0.004187342],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002750927,"threshold_uncertainty_score":0.009202778,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01089097901670851,"score_gpt":0.2254098807386153,"score_spread":0.2145189017219068,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}