{"id":"W2152427310","doi":"10.4028/www.scientific.net/ssp.219.233","title":"The Role of Mass Transfer in Removal of Cross-Linked Sacrificial Layers in 3DI Applications","year":2014,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nexen (Canada)","funders":"","keywords":"Materials science; Passivation; Wafer; Photoresist; Thermal copper pillar bump; Nanotechnology; Soldering; Microelectronics; Layer (electronics); Composite material; Flip chip; Adhesive","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002741319,0.0005516173,0.0001651048,0.0002357783,0.0002195011,0.00053021,0.0005502948,0.0004818954,0.001670279],"category_scores_gemma":[0.000302719,0.0002209461,0.0001701297,0.0001882666,0.0003333258,0.0006205083,0.0002667603,0.0004866616,0.0008521623],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005121317,"about_ca_system_score_gemma":0.0001603512,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000351968,"about_ca_topic_score_gemma":0.0006043553,"domain_scores_codex":[0.9998647,0.00001643461,0.000005681736,0.00003188337,0.0000646233,0.00001664652],"domain_scores_gemma":[0.9998457,0.00006381211,0.00004344123,0.00001544496,0.0000207281,0.00001090058],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004322185,0.00002440803,0.0002277411,0.0001706259,0.000003780481,0.00003663863,0.00003898878,0.000389033,0.9757415,0.0007360521,0.0001993162,0.02238853],"study_design_scores_gemma":[0.000004124262,0.0002055723,0.0008151432,0.000007097586,0.000006038575,0.000138326,0.00001902701,0.002646289,0.9903321,0.0002231541,0.005597126,0.000006081294],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.768333,0.08933176,0.1222415,0.001503699,0.0004538195,0.0001920428,0.0002597684,0.0009141772,0.01677022],"genre_scores_gemma":[0.9282993,0.01413213,0.04875007,0.0002493317,0.0001741607,0.00005463594,0.0001499499,0.0001038025,0.008086671],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001670279,"threshold_uncertainty_score":0.005587637,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01965945960864773,"score_gpt":0.2781461692058208,"score_spread":0.2584867095971731,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}