{"id":"W2152456038","doi":"10.1039/c4tc01418a","title":"Atomic layer deposition of Cu with a carbene-stabilized Cu(<scp>i</scp>) silylamide","year":2014,"lang":"en","type":"article","venue":"Journal of Materials Chemistry C","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Science Foundation Ireland","keywords":"Copper; Layer (electronics); Atomic layer deposition; Materials science; Deposition (geology); Metal; Hydrogen; Carbene; Inorganic chemistry; Chemical engineering; Catalysis; Nanotechnology; Chemistry; Metallurgy; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001511715,0.0004541702,0.0002363239,0.0002514,0.0002181873,0.0002442889,0.0005148837,0.0002409372,0.0009986246],"category_scores_gemma":[0.0002088449,0.0002310126,0.0001401627,0.000210706,0.0001725691,0.0002049672,0.000229475,0.0002411194,0.0001997318],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003283125,"about_ca_system_score_gemma":0.0002537608,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001640798,"about_ca_topic_score_gemma":0.002517842,"domain_scores_codex":[0.9998814,0.000009819242,0.000007599788,0.00003064976,0.0000357172,0.00003471179],"domain_scores_gemma":[0.9998754,0.00002034297,0.00004434271,0.00002159587,0.00002043475,0.0000178578],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005542266,0.000007525504,0.0001067719,0.00006404907,0.000007631776,0.00004249508,0.00002008421,0.00006755556,0.9985343,0.00007901481,0.00008175876,0.000933235],"study_design_scores_gemma":[0.000005249306,0.00007701157,0.0004151171,0.000002506486,0.000007433141,0.00004084055,0.000007056987,0.0003266108,0.9983752,0.000004873695,0.0007361114,0.00000202824],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9921257,0.00130693,0.003033126,0.00003989998,0.00004013216,0.00003075256,0.0001878004,0.0002644139,0.002971188],"genre_scores_gemma":[0.9949195,0.0004803356,0.003120842,0.00001293122,0.00001022043,0.00001433634,0.0001291241,0.00003102826,0.001281749],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001640798,"threshold_uncertainty_score":0.003340721,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007531913202587886,"score_gpt":0.202235731691301,"score_spread":0.1947038184887131,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}