{"id":"W2152485136","doi":"10.1109/nanoel.2006.1609730","title":"Patterning of Functional Materials by Pulsed Laser Deposition through Nanostencils","year":2006,"lang":"en","type":"article","venue":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Fonds Québécois de la Recherche sur la Nature et les Technologies; Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Deposition (geology); Materials science; Substrate (aquarium); Lithography; Nanotechnology; Pulsed laser deposition; Nanostructure; Resist; Photoresist; Shadow mask; Optoelectronics; Thin film; Layer (electronics); Computer science; Computer graphics (images)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001323882,0.00030903,0.0003245519,0.0002670744,0.0001053644,0.00004921388,0.0003439467,0.0003111529,0.00007792604],"category_scores_gemma":[0.00001805073,0.0003113557,0.00008879423,0.0005361274,0.0001161856,0.0002012686,0.00002792446,0.0002727328,0.00001270019],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001321875,"about_ca_system_score_gemma":0.00004186367,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000840209,"about_ca_topic_score_gemma":0.000018624,"domain_scores_codex":[0.9983389,0.0000326142,0.0004999159,0.0003224784,0.0002986934,0.0005073922],"domain_scores_gemma":[0.9992296,0.00003547841,0.0001702613,0.0004178024,0.0001294042,0.0000175184],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001767416,0.00006981358,0.0001419225,0.00005117148,0.00003376402,0.000001636402,0.00001637952,0.0007744333,0.9658009,0.009638132,0.01474973,0.008704389],"study_design_scores_gemma":[0.0002487357,0.0001472451,0.0000765733,0.00008469028,0.00001998896,0.000005251585,0.00006060647,0.001438321,0.9874032,0.006026645,0.004156617,0.0003321992],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6890257,0.001803348,0.2923975,0.0007522639,0.0006252294,0.0006953073,0.00026001,0.008249876,0.006190776],"genre_scores_gemma":[0.9967753,0.0007388372,0.001976127,0.00003491679,0.00002943469,0.0001210817,0.0001511585,0.00004413588,0.000128975],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3077496,"threshold_uncertainty_score":0.9999338,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01142357695305265,"score_gpt":0.2143399934185695,"score_spread":0.2029164164655169,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}