{"id":"W2152485136","doi":"10.1109/nanoel.2006.1609730","title":"Patterning of Functional Materials by Pulsed Laser Deposition through Nanostencils","year":2006,"lang":"en","type":"article","venue":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Fonds Québécois de la Recherche sur la Nature et les Technologies; Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Deposition (geology); Materials science; Substrate (aquarium); Lithography; Nanotechnology; Pulsed laser deposition; Nanostructure; Resist; Photoresist; Shadow mask; Optoelectronics; Thin film; Layer (electronics); Computer science; Computer graphics (images)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007463141,0.0003466427,0.0002090176,0.0001497202,0.0001442795,0.0003593051,0.0003999944,0.000323095,0.001572241],"category_scores_gemma":[0.0001463323,0.0002337589,0.0001939101,0.0001221008,0.0002709745,0.0003782988,0.0003775924,0.0003858487,0.0007252628],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002573166,"about_ca_system_score_gemma":0.0001387537,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001375469,"about_ca_topic_score_gemma":0.0002910635,"domain_scores_codex":[0.999896,0.000005980016,0.0000067357,0.00002886469,0.00004269002,0.00001968728],"domain_scores_gemma":[0.9999193,0.00002241106,0.00002259958,0.00001838322,0.000009475773,0.00000787557],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001438674,0.000007867798,0.00004980446,0.00007717788,0.000003288019,0.000122435,0.00002504376,0.0002839888,0.9953976,0.000891338,0.0001282119,0.002998892],"study_design_scores_gemma":[0.000005070882,0.00005199054,0.0002075608,0.000003147223,0.0000024091,0.0001520387,0.000007840607,0.001782296,0.9928284,0.0001515165,0.004803188,0.000004561251],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8970042,0.002307729,0.0837851,0.0003242551,0.0003100225,0.0001314922,0.0004908827,0.001057382,0.01458883],"genre_scores_gemma":[0.9215577,0.001823078,0.06665119,0.0001777738,0.00006562482,0.000163129,0.0004054196,0.0001587755,0.008997343],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001572241,"threshold_uncertainty_score":0.005259693,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01142357695305265,"score_gpt":0.2143399934185695,"score_spread":0.2029164164655169,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}