{"id":"W2153162881","doi":"10.1088/0960-1317/17/9/007","title":"A MEMS stage for 3-axis nanopositioning","year":2007,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":76,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Fabrication; Actuator; Comb drive; Coupling (piping); Plane (geometry); Engineering; Materials science; Optics; Physics; Optoelectronics; Electrical engineering; Mechanical engineering; Geometry; Mathematics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002847619,0.0004679876,0.0003477852,0.0002415803,0.0005363909,0.0003330326,0.0006146767,0.0007233478,0.00300978],"category_scores_gemma":[0.000406707,0.0004086231,0.0003663052,0.0001463118,0.0003837592,0.0004845896,0.0005423749,0.0005786786,0.00108205],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003757067,"about_ca_system_score_gemma":0.0005522755,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006174266,"about_ca_topic_score_gemma":0.001075847,"domain_scores_codex":[0.9996245,0.00002758892,0.00001933892,0.00006667646,0.0002206096,0.00004133309],"domain_scores_gemma":[0.9997227,0.00006931085,0.00004954936,0.00005470473,0.00007383755,0.00002984544],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006228237,0.00001224677,0.0003030618,0.00006028785,0.000007375467,0.0001048293,0.00004819096,0.0004079659,0.9881321,0.001161479,0.0005433414,0.009156715],"study_design_scores_gemma":[0.00003780507,0.0004762151,0.003858104,0.00001512769,0.00002021531,0.0008916312,0.00002795241,0.01128462,0.9607942,0.0004033806,0.02213688,0.00005393206],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5929048,0.001560786,0.3823684,0.0008724935,0.0009403449,0.0006617027,0.001114281,0.002604679,0.01697247],"genre_scores_gemma":[0.6752353,0.0003789602,0.313812,0.0002431142,0.00008551866,0.0002507222,0.0003851128,0.0001191042,0.009490109],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00300978,"threshold_uncertainty_score":0.01006866,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00577952925708749,"score_gpt":0.2114708166587748,"score_spread":0.2056912874016873,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}