{"id":"W2153364814","doi":"10.1116/1.4935506","title":"Enhanced adhesion of electron beam resist by grafted monolayer poly(methylmethacrylate-<i>co</i>-methacrylic acid) brush","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Waterloo","funders":"","keywords":"Resist; Materials science; Monolayer; Copolymer; Photoresist; Polystyrene; Silicon; Electron-beam lithography; Methacrylic acid; Adhesion; Substrate (aquarium); Nanotechnology; Chemical engineering; Polymer chemistry; Layer (electronics); Composite material; Polymer; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002955203,0.0004183497,0.0008024951,0.001954258,0.000259412,0.00007533944,0.0007994134,0.0005102583,0.000002442061],"category_scores_gemma":[0.000164679,0.0003775991,0.000051181,0.001784872,0.001109823,0.0005801102,0.0001488427,0.0006581282,5.266222e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003672301,"about_ca_system_score_gemma":0.0003828189,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003795925,"about_ca_topic_score_gemma":0.000002747395,"domain_scores_codex":[0.9970217,0.00005527849,0.0009976482,0.0004645258,0.0005836182,0.0008771851],"domain_scores_gemma":[0.9980899,0.0000170408,0.0007326953,0.0003523677,0.0006745104,0.0001334555],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001588624,0.00007979996,0.0000636757,0.00009845126,0.00006628643,0.000002178256,0.0001521666,0.000002087616,0.9731774,0.0003084415,0.00005473912,0.02583586],"study_design_scores_gemma":[0.000903366,0.001233647,0.00002011608,0.0001786354,0.00008086578,0.000104831,0.0001790374,0.00001515999,0.9817525,0.01421906,0.0009753387,0.0003374725],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.923643,0.05649415,0.01881319,0.0002170895,0.000172793,0.0002874463,0.000007388867,0.0003211511,0.00004381001],"genre_scores_gemma":[0.9872381,0.004337251,0.008291502,0.00002869333,0.00002615308,0.00002844617,0.000001493559,0.00004322092,0.00000514608],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06359512,"threshold_uncertainty_score":0.9998676,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01152270830114064,"score_gpt":0.2464104601799408,"score_spread":0.2348877518788001,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}