{"id":"W2154600836","doi":"10.1557/proc-0961-o10-07","title":"A Nanodamascene Process to be used as a Building Block for Nanodevices","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Quantum-Dot Cellular Automata","field":"Computer Science","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Transistor; Fabrication; Capacitance; Chemical-mechanical planarization; Nanotechnology; Optoelectronics; Polishing; Block (permutation group theory); Oxide; Process (computing); Engineering physics; Electrical engineering; Computer science; Composite material; Electrode; Metallurgy; Voltage","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009941175,0.0002100128,0.0001839299,0.0001926073,0.0003518796,0.0002478678,0.0002798183,0.0003910728,0.00201007],"category_scores_gemma":[0.0001958946,0.0001347109,0.0001307201,0.0001445121,0.0002535332,0.0005016463,0.00038334,0.0004464773,0.0006326652],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001860513,"about_ca_system_score_gemma":0.0001854725,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00017975,"about_ca_topic_score_gemma":0.0003247691,"domain_scores_codex":[0.9999408,0.000005223124,0.000003248876,0.0000183699,0.00002089463,0.00001155282],"domain_scores_gemma":[0.9999437,0.00001349553,0.000009455648,0.00001284866,0.00000671663,0.00001385707],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004849368,0.00002380435,0.00005719901,0.00007056375,0.000003075104,0.0001251442,0.00005972088,0.0004352006,0.9887506,0.006270784,0.0003137709,0.003841709],"study_design_scores_gemma":[0.00001569013,0.0001170701,0.0001773117,0.000005163764,0.000005148776,0.0001134337,0.00001318344,0.001699847,0.9847205,0.001174704,0.01194916,0.000008731924],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8933928,0.002461829,0.07614582,0.001249852,0.0006299924,0.0001987336,0.0005194786,0.0007517444,0.02464985],"genre_scores_gemma":[0.9660348,0.0008659582,0.02200271,0.0001479361,0.00004362185,0.0001066333,0.0001520793,0.00006897817,0.01057726],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00201007,"threshold_uncertainty_score":0.006724358,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01599099338136258,"score_gpt":0.2706099045107109,"score_spread":0.2546189111293484,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}