{"id":"W2154600836","doi":"10.1557/proc-0961-o10-07","title":"A Nanodamascene Process to be used as a Building Block for Nanodevices","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Quantum-Dot Cellular Automata","field":"Computer Science","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Transistor; Fabrication; Capacitance; Chemical-mechanical planarization; Nanotechnology; Optoelectronics; Polishing; Block (permutation group theory); Oxide; Process (computing); Engineering physics; Electrical engineering; Computer science; Composite material; Electrode; Metallurgy; Voltage","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005503689,0.000333961,0.0003460561,0.000289325,0.0003000874,0.0007052245,0.001786894,0.0001212846,0.000006442348],"category_scores_gemma":[0.0001655811,0.0003274049,0.0001207742,0.001152992,0.00003975052,0.001013435,0.0003461743,0.0001247902,0.00006391924],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009283338,"about_ca_system_score_gemma":0.0001322746,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007228645,"about_ca_topic_score_gemma":0.00001327594,"domain_scores_codex":[0.997162,0.000006619462,0.0004297114,0.0009515006,0.0006730183,0.0007770907],"domain_scores_gemma":[0.9987833,0.00006762334,0.0002106131,0.0003146487,0.0004299527,0.0001938307],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007433203,0.0004568273,0.003054228,0.001064871,0.00006930437,0.00003180264,0.007366115,0.0001549587,0.6661133,0.3005705,0.01759761,0.003446208],"study_design_scores_gemma":[0.001329255,0.0004555056,0.0005717281,0.0002589854,0.00004192261,0.0001267159,0.0002715781,0.05658357,0.8526131,0.01655236,0.07013229,0.001063001],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9773665,0.0001155698,0.0132839,0.004825704,0.0002545971,0.001015235,0.000004668017,0.0009108521,0.002222971],"genre_scores_gemma":[0.9533537,9.444855e-7,0.04386158,0.001186563,0.0001823924,0.0002748566,0.00000313852,0.00005124441,0.00108556],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2840182,"threshold_uncertainty_score":0.9999178,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01599099338136258,"score_gpt":0.2706099045107109,"score_spread":0.2546189111293484,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}