{"id":"W2154627189","doi":"10.1109/sensor.2009.5285840","title":"Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime","year":2009,"lang":"en","type":"article","venue":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Knudsen number; Inertia; Molecular dynamics; Microelectromechanical systems; Reynolds number; Physics; Materials science; Mechanics; Classical mechanics; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003163546,0.0003851734,0.00031166,0.0002007598,0.0002598072,0.0002799042,0.0006739146,0.0003947152,0.0009630866],"category_scores_gemma":[0.0006125251,0.0002906404,0.0002009816,0.0001321291,0.0006189989,0.0005518263,0.0003589973,0.0005338325,0.0002071838],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002487257,"about_ca_system_score_gemma":0.0001437178,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005709673,"about_ca_topic_score_gemma":0.0007405666,"domain_scores_codex":[0.999712,0.00002270348,0.000009222851,0.00005478888,0.0001792507,0.00002200553],"domain_scores_gemma":[0.9995793,0.000231388,0.00005388366,0.00005353964,0.00005979385,0.00002214388],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007205805,0.00001488456,0.0002360168,0.00004065433,0.000004804279,0.00004805863,0.00005517863,0.0002922623,0.9973131,0.0001126181,0.00001707614,0.001793387],"study_design_scores_gemma":[0.00001729177,0.0003674337,0.003214902,0.000003532019,0.00001260254,0.0000880745,0.00004446167,0.00724144,0.9884199,0.00006038967,0.0005169287,0.00001301773],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9830413,0.0002757178,0.01588946,0.00006069796,0.00002629785,0.000034523,0.0000747911,0.00009193341,0.0005053518],"genre_scores_gemma":[0.9838458,0.0002965021,0.0150876,0.00001852428,0.00001504388,0.00003561316,0.0000488215,0.00001559512,0.0006365384],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009630866,"threshold_uncertainty_score":0.003221869,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02287250449994815,"score_gpt":0.2561423414818544,"score_spread":0.2332698369819062,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}