{"id":"W2154627189","doi":"10.1109/sensor.2009.5285840","title":"Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime","year":2009,"lang":"en","type":"article","venue":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Knudsen number; Inertia; Molecular dynamics; Microelectromechanical systems; Reynolds number; Physics; Materials science; Mechanics; Classical mechanics; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003107898,0.0004317749,0.0004092098,0.0002589599,0.000119353,0.0001724349,0.0006547338,0.0001729407,0.00002861904],"category_scores_gemma":[0.00004860335,0.0003497981,0.0001003569,0.0002064843,0.00008833977,0.0002694476,0.00002490172,0.0004605718,0.00001870846],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001345702,"about_ca_system_score_gemma":0.00003424631,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001318691,"about_ca_topic_score_gemma":0.0001910243,"domain_scores_codex":[0.9979761,0.00003562557,0.0005575978,0.0004517473,0.0004438429,0.00053512],"domain_scores_gemma":[0.9991971,0.00006726372,0.0001161729,0.0004248334,0.0001023118,0.00009226569],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000448813,0.0003259893,0.0001157068,0.0001523048,0.0003860481,0.0002719795,0.008399826,0.04246523,0.9002347,0.002844245,0.01061329,0.03374189],"study_design_scores_gemma":[0.0209421,0.001670761,0.009936151,0.003754918,0.0002086254,0.0005686405,0.005889791,0.04946471,0.7851015,0.02814962,0.08841085,0.005902343],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9837787,0.0005036285,0.007529967,0.001236211,0.0005204977,0.0007351991,0.0002042593,0.0003731078,0.005118443],"genre_scores_gemma":[0.9975205,0.001202981,0.0005118335,0.0003462361,0.00006746494,0.00002667236,0.00003473619,0.00003391011,0.0002556509],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1151332,"threshold_uncertainty_score":0.9998954,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02287250449994815,"score_gpt":0.2561423414818544,"score_spread":0.2332698369819062,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}