{"id":"W2154843140","doi":"10.1109/transducers.2011.5969836","title":"CMOS-MEMS atomic force microscope","year":2011,"lang":"en","type":"article","venue":"","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; CMOS; Materials science; Piezoresistive effect; Chip; Fabrication; Image sensor; Electronics; Microscope; Electronic engineering; Optoelectronics; Computer science; Electrical engineering; Engineering; Optics; Artificial intelligence; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00003991847,0.0001037568,0.00009323668,0.0000223992,0.00009473406,0.00002234206,0.0001859632,0.00002554823,0.004738304],"category_scores_gemma":[2.538758e-7,0.00009082517,0.00007053283,0.00008824784,0.00004545874,0.00006863365,0.00005372336,0.00007315341,0.0004764846],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000009188604,"about_ca_system_score_gemma":0.00001935437,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006684449,"about_ca_topic_score_gemma":0.000002663068,"domain_scores_codex":[0.9994467,0.000003716087,0.0001355413,0.0001804336,0.00003698476,0.0001965754],"domain_scores_gemma":[0.9995902,0.000005321564,0.00004165592,0.000282509,0.00002376377,0.00005652916],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001019741,0.0002144687,0.02077301,0.000006020339,0.00003856164,3.484184e-7,0.0004929506,5.220406e-7,0.2841522,0.6448752,0.03840383,0.01103274],"study_design_scores_gemma":[0.0002181023,0.0000371387,0.00128048,0.000009387055,0.00001491875,8.625211e-7,0.0001358882,0.00008519719,0.8941062,0.05267068,0.05118494,0.0002562264],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.398046,0.0000160192,0.1353367,0.00004483389,0.00007174438,0.0002702491,0.00002587935,0.0001837306,0.4660048],"genre_scores_gemma":[0.9597834,0.00000150763,0.02026355,0.000114902,0.00005837314,0.00007160718,0.00002115476,0.00001829774,0.01966721],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.609954,"threshold_uncertainty_score":0.9961715,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01570004775331291,"score_gpt":0.257797476876552,"score_spread":0.2420974291232391,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}