{"id":"W2155513405","doi":"10.1557/proc-0934-i09-14","title":"Oxidation of Structured Silicon Thin Films for Inverse Silicon Square Spiral Photonic Crystal Fabrication","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; University of Alberta","keywords":"Materials science; Silicon; Fabrication; Photonic crystal; Isotropic etching; Optoelectronics; Chemical vapor deposition; Nanotechnology; Etching (microfabrication); Optics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008687569,0.0001791422,0.0001496428,0.0001273263,0.0001646445,0.000271107,0.0002061532,0.0002288632,0.0009878832],"category_scores_gemma":[0.0001831595,0.000266857,0.0001372168,0.00008950463,0.0001271356,0.0002056636,0.0001851083,0.0004225614,0.0002265853],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002219099,"about_ca_system_score_gemma":0.0001858059,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005075604,"about_ca_topic_score_gemma":0.002094669,"domain_scores_codex":[0.999933,0.000004027163,0.000004467208,0.00001237298,0.0000300874,0.00001618849],"domain_scores_gemma":[0.9999267,0.00001779938,0.00001313506,0.00001559174,0.00002005168,0.000006764985],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002640991,0.000007975896,0.0001317103,0.00005216326,0.000004539807,0.00003814225,0.00003247303,0.0001940747,0.9969488,0.0002065962,0.0001326527,0.002224477],"study_design_scores_gemma":[0.000005797021,0.00004339506,0.0005854837,0.000004857646,0.000004712064,0.00005099518,0.00002491638,0.001772558,0.9963999,0.00006163524,0.001043529,0.000002240221],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9865251,0.0006648715,0.006674786,0.0001474142,0.0001086296,0.00002687578,0.0001164645,0.0001090094,0.005626909],"genre_scores_gemma":[0.9926892,0.0003028566,0.005087169,0.00002819324,0.000009269849,0.000009421002,0.0001063004,0.00002961705,0.001738085],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009878832,"threshold_uncertainty_score":0.003304839,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009572685048611893,"score_gpt":0.2376836439388169,"score_spread":0.228110958890205,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}