{"id":"W2155576477","doi":"10.1109/asmc.1990.111216","title":"Hub-centered production control of wafer fabrication","year":2002,"lang":"en","type":"article","venue":"","topic":"Scheduling and Optimization Algorithms","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Control (management); Production (economics); Wafer; Production control; Process (computing); Computer science; Wafer fabrication; Process control; Photolithography; Fabrication; Flow control (data); Manufacturing engineering; Engineering; Artificial intelligence; Computer network; Electrical engineering; Programming language; Nanotechnology; Materials science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000329629,0.0000410429,0.00005570917,0.00003893249,0.00001149111,0.000005231204,0.00003089531,0.00002389969,0.0003754943],"category_scores_gemma":[0.00002904182,0.00003845642,0.00001701331,0.00009606947,0.000007296132,0.00005604599,0.000001651561,0.00002867607,0.00005655763],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001174816,"about_ca_system_score_gemma":7.503621e-7,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001506538,"about_ca_topic_score_gemma":3.483681e-7,"domain_scores_codex":[0.9997095,0.00000582437,0.0001088597,0.00005945667,0.00005885766,0.00005748792],"domain_scores_gemma":[0.9998077,0.000006041184,0.00001417395,0.00009635992,0.00005806804,0.00001762467],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000006566769,0.0001156431,0.001461847,0.00007147793,0.00005075145,2.889377e-7,0.0004779405,0.9363478,0.008636915,0.000406698,0.00741482,0.04500927],"study_design_scores_gemma":[0.0002827484,0.000007942936,0.0004884293,0.000005587378,0.000006892473,0.000001073571,0.00002550851,0.9869309,0.01180605,0.00001137435,0.0003786953,0.00005481532],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.03131685,0.0003142761,0.9547048,0.0003989971,0.0008229802,0.0001755644,0.000002533391,0.0004870414,0.011777],"genre_scores_gemma":[0.9843349,0.00004101605,0.01458027,0.00001996076,0.00007531986,0.000005394675,0.00000317574,0.000008478524,0.0009314136],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.9530181,"threshold_uncertainty_score":0.4111399,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01568818416413501,"score_gpt":0.1974765012769489,"score_spread":0.1817883171128139,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}