{"id":"W2156668337","doi":"10.1109/memsys.1998.659830","title":"Micromachined accelerometer based on convection heat transfer","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":119,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Accelerometer; Heat transfer; Masking (illustration); Thermal; Sensitivity (control systems); Convection; Surface micromachining; Convective heat transfer; Acoustics; Materials science; Mechanical engineering; Computer science; Electrical engineering; Engineering; Mechanics; Electronic engineering; Physics; Fabrication; Meteorology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000271257,0.0004938671,0.0004564727,0.0002777072,0.0002549705,0.0003006814,0.0007853676,0.00053102,0.002181558],"category_scores_gemma":[0.0005628746,0.0004204522,0.0001685344,0.000173193,0.000418575,0.0005651774,0.0002567779,0.0007381183,0.0006992476],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003992066,"about_ca_system_score_gemma":0.0004813608,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008094157,"about_ca_topic_score_gemma":0.002136796,"domain_scores_codex":[0.9996314,0.00002314015,0.00001773084,0.00009358409,0.0002072135,0.00002682917],"domain_scores_gemma":[0.9997399,0.00006469892,0.00004103225,0.00004080533,0.00008874502,0.00002476508],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000117382,0.00002865964,0.000521903,0.0001482343,0.00001265977,0.00008087052,0.00004342041,0.0007168807,0.9797941,0.001595166,0.001149092,0.0157917],"study_design_scores_gemma":[0.0001049082,0.00063639,0.006315478,0.0000297649,0.00003625029,0.0008307697,0.00002088518,0.02745398,0.9445511,0.000465784,0.0194833,0.00007131367],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5316132,0.005079019,0.4266615,0.001026048,0.003245627,0.001113764,0.00175199,0.006161793,0.02334715],"genre_scores_gemma":[0.6377293,0.001056863,0.3471905,0.000160719,0.0001677106,0.0002889309,0.0003856112,0.00005755692,0.01296265],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002181558,"threshold_uncertainty_score":0.007298052,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01554724418919895,"score_gpt":0.193977324242642,"score_spread":0.178430080053443,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}