{"id":"W2156963453","doi":"10.1109/ccece.2007.80","title":"Assembly and Characterization of Buckled Cantilever Platforms for Thermal Isolation in a Polymer Micromachining Process","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Cantilever; Fabrication; Microelectromechanical systems; Surface micromachining; Materials science; Lift (data mining); Process (computing); Polymer; Nanotechnology; Thermal; Mechanical engineering; Computer science; Engineering; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006494438,0.00005928926,0.00008459394,0.00009058075,0.00001322705,0.00000390013,0.00002727318,0.00006258628,0.000002325196],"category_scores_gemma":[0.000006735236,0.00005004436,0.000009053882,0.00008061965,0.000009925488,0.0001831786,0.000006288749,0.00004299665,1.2133e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000009628646,"about_ca_system_score_gemma":0.00000342276,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000754875,"about_ca_topic_score_gemma":0.00003798662,"domain_scores_codex":[0.9996582,2.342169e-7,0.0001361006,0.00006324729,0.0000294509,0.0001127161],"domain_scores_gemma":[0.9998922,0.00001809445,0.00002669382,0.00004029274,0.00001290011,0.000009804466],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001670593,0.000004759346,0.001580587,0.00004333353,0.000003690151,2.364705e-7,0.0002057132,0.0000383195,0.9801021,0.0001611534,3.496468e-7,0.01784312],"study_design_scores_gemma":[0.0002728327,0.00001958005,0.04592943,0.00002264205,0.00000181192,0.00000102306,0.0001173778,0.006963461,0.9464969,0.00009446312,0.00001106714,0.00006942283],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9531215,0.00005631868,0.04638941,0.000005857588,0.00003037742,0.0001346646,0.000002781104,0.0001046241,0.0001545054],"genre_scores_gemma":[0.9985669,0.0000132243,0.001345218,0.00000714668,0.00001067759,0.000008618317,0.000008124854,0.0000115487,0.00002855238],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04544543,"threshold_uncertainty_score":0.204075,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007202053864404321,"score_gpt":0.2375464769917908,"score_spread":0.2303444231273865,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}