{"id":"W2157736916","doi":"10.1117/1.jmm.14.2.024001","title":"Mapping stresses in high aspect ratio polysilicon electrical through-wafer interconnects","year":2015,"lang":"en","type":"article","venue":"Journal of Micro/Nanolithography MEMS and MOEMS","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; Micralyne; University of Alberta","funders":"National Research Council Canada; Natural Sciences and Engineering Research Council of Canada; Alberta Innovates - Technology Futures","keywords":"Materials science; Wafer; Optoelectronics; Deep reactive-ion etching; Chemical vapor deposition; Microelectromechanical systems; Raman spectroscopy; Silicon; Polysilicon depletion effect; Reactive-ion etching; Etching (microfabrication); Electronic engineering; Transistor; Nanotechnology; Electrical engineering; Optics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002417585,0.0002052,0.0004216039,0.000608084,0.00003038555,0.0000643232,0.0001968117,0.0001648095,0.000006303227],"category_scores_gemma":[0.0000634469,0.0001649934,0.0001248134,0.0006013085,0.00007997361,0.0003275922,0.00003857974,0.0004292697,0.000002112311],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005020668,"about_ca_system_score_gemma":0.00003644366,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006320929,"about_ca_topic_score_gemma":0.00003154062,"domain_scores_codex":[0.9988406,0.00002571554,0.0004941663,0.0001447591,0.0001683539,0.0003264075],"domain_scores_gemma":[0.999482,0.00005719701,0.0001233455,0.0001495919,0.00008819482,0.0000997133],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003306373,0.0006915284,0.1267255,0.0003066275,0.001261419,0.0008757908,0.008729356,0.00142344,0.7669851,0.008686651,0.01360062,0.0703833],"study_design_scores_gemma":[0.01070299,0.003210854,0.1651165,0.001453479,0.0002222488,0.00255028,0.01253252,0.001137202,0.708057,0.04414116,0.04862065,0.002255036],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9804438,0.01616048,0.002086473,0.0001784905,0.0004110595,0.00008886815,0.000003623927,0.00009188029,0.0005353175],"genre_scores_gemma":[0.9960284,0.002087716,0.001667893,0.00004088804,0.000132652,0.000003618448,0.000001237261,0.00002253729,0.00001508346],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06812826,"threshold_uncertainty_score":0.6728235,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01599585636809884,"score_gpt":0.2188508127885838,"score_spread":0.2028549564204849,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}