{"id":"W2159086395","doi":"10.1109/esime.2005.1502824","title":"Design of a high-Q CMOS-compatible MEMS tunable capacitor for RF applications","year":2005,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Iran Telecommunication Research Center; University of Waterloo","keywords":"Varicap; CMOS; Capacitor; Q factor; Materials science; Surface micromachining; Microelectromechanical systems; Optoelectronics; Equivalent series resistance; Cantilever; Electrical engineering; Capacitance; Voltage; Electronic engineering; Engineering; Electrode; Fabrication; Resonator; Physics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001295075,0.0003013877,0.000264191,0.000160933,0.0004306072,0.0004473672,0.001217301,0.0007223606,0.001713104],"category_scores_gemma":[0.0002378998,0.0002676173,0.0002049954,0.000254708,0.0002022252,0.0003944176,0.0002158473,0.0003601364,0.0006874059],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006621226,"about_ca_system_score_gemma":0.0007303523,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00112179,"about_ca_topic_score_gemma":0.002217762,"domain_scores_codex":[0.9998653,0.00001096734,0.000005976292,0.00003811149,0.00006028914,0.00001928738],"domain_scores_gemma":[0.999809,0.00002154716,0.00003605097,0.00001483435,0.0000855035,0.00003319065],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006983853,0.00002308506,0.0002638174,0.0001074315,0.00002605349,0.0002363829,0.000026992,0.001650907,0.9855861,0.001079724,0.001130574,0.00979912],"study_design_scores_gemma":[0.0001656595,0.0006806565,0.00270421,0.00001840778,0.00008653069,0.001676009,0.00006095718,0.0383582,0.924487,0.0006190605,0.03108178,0.0000615989],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5041981,0.003409405,0.4689299,0.002375208,0.0008191094,0.0003826358,0.0008023059,0.002464355,0.01661896],"genre_scores_gemma":[0.8095365,0.0006430768,0.1816498,0.0004021314,0.0001320882,0.0001264663,0.0002943288,0.00009520774,0.007120388],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001713104,"threshold_uncertainty_score":0.005730867,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0189669229073155,"score_gpt":0.2326866638272662,"score_spread":0.2137197409199507,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}