{"id":"W2159359319","doi":"10.1109/mwsym.2006.249414","title":"Monolithic RF MEMS Switch Matrix Integration","year":2006,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Materials science; Interconnection; Crossbar switch; Fabrication; Radio frequency; Clos network; Optoelectronics; Matrix (chemical analysis); Electronic engineering; Electrical engineering; Computer science; Engineering; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001567287,0.0003589012,0.0002165205,0.0002782564,0.000263071,0.0005948432,0.000588742,0.0004197241,0.002666258],"category_scores_gemma":[0.0002119733,0.0001939513,0.0003212478,0.0002682088,0.0001412972,0.0005479314,0.0004205307,0.000431855,0.0008402634],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000294159,"about_ca_system_score_gemma":0.0002124413,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005204749,"about_ca_topic_score_gemma":0.0009859063,"domain_scores_codex":[0.9997554,0.00001832014,0.000006638033,0.00004768399,0.0001362855,0.00003548845],"domain_scores_gemma":[0.999864,0.00002297286,0.00001944757,0.00002352837,0.00005262403,0.00001742687],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006529898,0.00004765258,0.0004551951,0.00007204238,0.00003005846,0.000124949,0.00003756302,0.00120999,0.9718051,0.002251861,0.0006682842,0.02323206],"study_design_scores_gemma":[0.00003988039,0.0007717849,0.003758251,0.00001575922,0.00007742638,0.001202075,0.0000590392,0.03123037,0.9259305,0.00127017,0.03561791,0.00002691252],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6217031,0.003931973,0.3159955,0.0004357595,0.0007237881,0.0002548369,0.0004834763,0.003764222,0.05270728],"genre_scores_gemma":[0.8948436,0.0007409402,0.09440841,0.0001266948,0.0001208614,0.00009825458,0.0003640447,0.0001083625,0.009188929],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002666258,"threshold_uncertainty_score":0.008919537,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006137921016087577,"score_gpt":0.2041444243341018,"score_spread":0.1980065033180142,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}