{"id":"W2159359319","doi":"10.1109/mwsym.2006.249414","title":"Monolithic RF MEMS Switch Matrix Integration","year":2006,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Materials science; Interconnection; Crossbar switch; Fabrication; Radio frequency; Clos network; Optoelectronics; Matrix (chemical analysis); Electronic engineering; Electrical engineering; Computer science; Engineering; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002857484,0.00006635412,0.00006053444,0.00005156306,0.00001713723,0.00001867181,0.00006997567,0.00008151821,0.00006981331],"category_scores_gemma":[0.000005760865,0.00005283855,0.00002030712,0.00009745921,0.00001155554,0.00007132407,0.00001052285,0.00008648773,0.0001681092],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002541218,"about_ca_system_score_gemma":0.000002611674,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001397955,"about_ca_topic_score_gemma":0.00006828608,"domain_scores_codex":[0.999687,8.837829e-7,0.00009279414,0.00006099436,0.00004971246,0.0001086646],"domain_scores_gemma":[0.9998482,0.000008755117,0.000006234532,0.0001178365,0.00001053042,0.000008441059],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006931347,0.00007154298,0.006625758,0.000117753,0.00006367239,0.00001886084,0.0001882063,0.0232868,0.2530085,0.4277564,0.1491402,0.1397153],"study_design_scores_gemma":[0.0003887679,0.00004322711,0.01109475,0.00003189545,0.00001630781,0.00001546675,0.0006153656,0.08954383,0.7910303,0.08255094,0.02414541,0.0005237279],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6313024,0.0006649938,0.1770072,0.0002958106,0.000261091,0.0001072119,0.000001635253,0.004382364,0.1859773],"genre_scores_gemma":[0.9956276,0.00002677188,0.001954541,0.000007346119,0.00004070841,0.000008607491,0.000004412118,0.00001033923,0.002319623],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5380217,"threshold_uncertainty_score":0.216076,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006137921016087577,"score_gpt":0.2041444243341018,"score_spread":0.1980065033180142,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}