{"id":"W2159563595","doi":"10.1149/2.007312jss","title":"Oxygen Plasma and Humidity Dependent Surface Analysis of Silicon, Silicon Dioxide and Glass for Direct Wafer Bonding","year":2013,"lang":"en","type":"article","venue":"ECS Journal of Solid State Science and Technology","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":156,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Materials science; X-ray photoelectron spectroscopy; Wafer; Silicon; Reactive-ion etching; Silicon dioxide; Oxygen; Anodic bonding; Chemical engineering; Relative humidity; Humidity; Etching (microfabrication); Analytical Chemistry (journal); Nanotechnology; Composite material; Layer (electronics); Chemistry; Optoelectronics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005747857,0.0001349382,0.0004456107,0.0009036883,0.000121343,0.00004267952,0.0003163696,0.0001019529,0.000004335371],"category_scores_gemma":[0.0003183977,0.0001085555,0.00003775544,0.0009928023,0.0008226137,0.000395172,0.0001685709,0.0001866946,3.950216e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004222503,"about_ca_system_score_gemma":0.0000348199,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001028287,"about_ca_topic_score_gemma":0.00002341999,"domain_scores_codex":[0.9989362,0.000007445695,0.000364788,0.0001924092,0.0001887391,0.0003104279],"domain_scores_gemma":[0.9992064,0.000104386,0.0001598443,0.0001887075,0.0002637531,0.00007688087],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001946771,0.00003557675,0.04920983,0.00009851981,0.0005858223,0.00001567152,0.0003970148,0.003190048,0.9171491,0.001260138,0.0002762825,0.02776256],"study_design_scores_gemma":[0.0007308597,0.0004049633,0.0222836,0.00005172792,0.0002803858,0.0001054481,0.001775767,0.04387796,0.9199704,0.009480516,0.0007394286,0.0002989169],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975277,0.001184988,0.0003820685,0.0005406416,0.00006878709,0.0001247771,0.0000169785,0.0000734359,0.00008059543],"genre_scores_gemma":[0.9975401,0.001260817,0.001138344,0.000005554389,0.000005345006,0.000003647179,2.419839e-7,0.000007970859,0.00003793748],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04068791,"threshold_uncertainty_score":0.4426767,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01023634672878418,"score_gpt":0.2383324208805291,"score_spread":0.2280960741517449,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}