{"id":"W2159998721","doi":"10.1557/proc-609-a28.6","title":"Roughness of TFT Gate Metallization and its Impact on Leakage, Threshold Voltage Shift and Mobility","year":2000,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"PerkinElmer Biosignal; University of Waterloo","funders":"","keywords":"Materials science; Thin-film transistor; Threshold voltage; Optoelectronics; Leakage (economics); Surface finish; Surface roughness; Hillock; Transistor; Voltage; Composite material; Electrical engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002575692,0.000166897,0.000276406,0.0002304619,0.0002614928,0.0003923441,0.0001751026,0.0004895521,0.001589083],"category_scores_gemma":[0.00141883,0.0002111235,0.0002833428,0.0002601405,0.0003133397,0.0003213161,0.0001669661,0.0003291618,0.0002467146],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00031948,"about_ca_system_score_gemma":0.0001532988,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001581535,"about_ca_topic_score_gemma":0.001225607,"domain_scores_codex":[0.9998243,0.00002120995,0.00001005715,0.00003254825,0.00005673556,0.00005521764],"domain_scores_gemma":[0.9993332,0.0003735341,0.00009303719,0.00005594199,0.0001038613,0.0000403153],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001169511,0.00005239283,0.005226069,0.0001116935,0.00005163503,0.0003442974,0.0001234518,0.004142446,0.9837683,0.0003660877,0.0003929951,0.004251173],"study_design_scores_gemma":[0.00004675135,0.001040037,0.07154759,0.00001615588,0.0001364272,0.0006686882,0.0002571562,0.02466794,0.8998883,0.0002504051,0.001427018,0.00005350206],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9971716,0.0007384268,0.0009954089,0.00008598828,0.00002613227,0.000006990047,0.0001517778,0.00003591861,0.0007877296],"genre_scores_gemma":[0.9994276,0.0001225974,0.0001412691,0.000009355123,0.000006638092,0.000002501946,0.00006107792,0.000008529951,0.0002203752],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001589083,"threshold_uncertainty_score":0.005316019,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0115440805774571,"score_gpt":0.2422308817266928,"score_spread":0.2306868011492357,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}