{"id":"W2161188686","doi":"10.1088/0960-1317/14/12/020","title":"Post-packaging frequency tuning of microresonators by pulsed laser deposition","year":2004,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":33,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Materials science; Laser; Pulsed laser deposition; Optoelectronics; Resonator; Fluence; Deposition (geology); Silicon nitride; Sapphire; Silicon; Optics; Thin film; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000116614,0.0001904441,0.0003017348,0.0002686751,0.00003851079,0.00002163125,0.000149143,0.0001101447,0.000002931296],"category_scores_gemma":[0.00002225207,0.0001884824,0.00008826642,0.0001629025,0.00002092609,0.0002283179,0.00003486718,0.0003155436,5.750646e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009784709,"about_ca_system_score_gemma":0.00001670921,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008262857,"about_ca_topic_score_gemma":0.000002551257,"domain_scores_codex":[0.9991082,0.000002404022,0.0004364195,0.000102698,0.00009947504,0.0002508294],"domain_scores_gemma":[0.9995572,0.00001762411,0.0001373878,0.0001090108,0.0001046789,0.00007408442],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005560913,0.00001551966,0.000005834233,0.0001009326,0.00004995581,0.0000237756,0.000116863,0.002623783,0.993454,0.0001109249,0.00003813174,0.003454761],"study_design_scores_gemma":[0.000641698,0.0001170988,0.00002082914,0.0003269245,0.00002845749,0.0003580783,0.0002096648,0.0003187932,0.9968327,0.0006792318,0.0002818133,0.000184744],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9247625,0.008363055,0.0664026,0.0000522137,0.0002459883,0.00006095122,0.00002328247,0.00007767406,0.00001171209],"genre_scores_gemma":[0.9716858,0.002408225,0.02580289,0.00001819131,0.00002958907,0.000001204816,0.000003663307,0.00004585273,0.000004546172],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04692331,"threshold_uncertainty_score":0.768609,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002321666971350981,"score_gpt":0.1687876207309579,"score_spread":0.166465953759607,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}