{"id":"W2161652196","doi":"10.1109/led.2007.891259","title":"CMOS-Compatible Micromachined Toroid and Solenoid Inductors With High $Q$-Factors","year":2007,"lang":"en","type":"article","venue":"IEEE Electron Device Letters","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Asylum, Migration and Integration Fund","keywords":"Inductor; Solenoid; Q factor; CMOS; Surface micromachining; Materials science; Toroid; Fabrication; Plating (geology); Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0008074874,0.000508855,0.0005234747,0.0002195408,0.0002398103,0.0007346793,0.0006824275,0.0003169308,0.00167645],"category_scores_gemma":[0.001059879,0.0003104039,0.0002696693,0.0003265503,0.0003908516,0.0005723578,0.0002305017,0.0003249968,0.00108112],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008260034,"about_ca_system_score_gemma":0.0007526804,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001252512,"about_ca_topic_score_gemma":0.003101787,"domain_scores_codex":[0.9996322,0.00003836477,0.0000346654,0.00006637852,0.0001514098,0.0000768963],"domain_scores_gemma":[0.999144,0.0001118056,0.0001709148,0.0001068838,0.0003746148,0.00009183272],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001118396,0.00002153738,0.0004371289,0.000136448,0.00001312356,0.0001606312,0.0001465835,0.0005477596,0.9931566,0.0008008166,0.0004257435,0.004041711],"study_design_scores_gemma":[0.0000559267,0.0003436465,0.00121936,0.000009011696,0.00002668758,0.0002460265,0.00005848036,0.001931781,0.9866159,0.000121991,0.009347115,0.00002399741],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8356462,0.001344192,0.1478831,0.0004357409,0.0003579852,0.0004848496,0.001027976,0.001679574,0.01114041],"genre_scores_gemma":[0.8189312,0.0004731815,0.1722361,0.000061566,0.00004944496,0.000175471,0.0004382634,0.0001660072,0.007468882],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00167645,"threshold_uncertainty_score":0.005993068,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004868581053281832,"score_gpt":0.2004122715208835,"score_spread":0.1955436904676017,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}