{"id":"W2161982693","doi":"10.1109/icmens.2005.65","title":"LIGA Cavity Resonator for K-Band Applications","year":2006,"lang":"en","type":"article","venue":"","topic":"Microwave Engineering and Waveguides","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"LIGA; Resonator; Lithography; Finite element method; Q factor; Optics; Fabrication; Materials science; Microwave; X-ray lithography; Optoelectronics; Physics; Engineering; Resist; Nanotechnology; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001919595,0.0005124093,0.0006446178,0.0001571609,0.0005110421,0.000514603,0.0007448473,0.0007963615,0.003009857],"category_scores_gemma":[0.0003185266,0.0002636985,0.0003825276,0.0002094772,0.000326873,0.0007277875,0.0005419494,0.0004088902,0.003809078],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004118281,"about_ca_system_score_gemma":0.0002486463,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001340495,"about_ca_topic_score_gemma":0.0002645905,"domain_scores_codex":[0.9998312,0.00002892352,0.000009398362,0.00005126996,0.00005169627,0.0000274779],"domain_scores_gemma":[0.9997929,0.0000421649,0.00006041871,0.00003595607,0.00003884027,0.00002978407],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001323235,0.00002010224,0.0004649835,0.0001537769,0.00002050234,0.0002483497,0.00006987404,0.0005928156,0.9725841,0.005142303,0.001554078,0.01901676],"study_design_scores_gemma":[0.0000747013,0.001338345,0.005635014,0.00004178703,0.00008845832,0.004397349,0.00008642014,0.02840467,0.8557054,0.002723321,0.1013679,0.0001367442],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5047354,0.01257687,0.4278006,0.001751642,0.0009811014,0.0001857371,0.0007137529,0.008951665,0.04230331],"genre_scores_gemma":[0.8079709,0.0009293361,0.1754622,0.0002465459,0.000128301,0.0001269246,0.0002165627,0.0001940533,0.0147251],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003009857,"threshold_uncertainty_score":0.01006895,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004982472305335451,"score_gpt":0.1912414129977828,"score_spread":0.1862589406924474,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}