{"id":"W2162421691","doi":"10.1116/1.1667504","title":"Fabrication of (NH4)2S passivated GaAs metal-insulator-semiconductor devices using low-frequency plasma-enhanced chemical vapor deposition","year":2004,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Passivation; Materials science; Optoelectronics; Silicon nitride; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Capacitor; Semiconductor; Silicon; Capacitance; Annealing (glass); Surface states; Analytical Chemistry (journal); Voltage; Electrode; Electrical engineering; Nanotechnology; Chemistry; Composite material; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001265155,0.000369631,0.0003575606,0.0001627237,0.0002003362,0.0004279012,0.00058817,0.0003670405,0.0008094335],"category_scores_gemma":[0.000183759,0.0003370963,0.0002308961,0.0002147816,0.0001717732,0.0002750459,0.0001999828,0.0003405008,0.0004603461],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002610019,"about_ca_system_score_gemma":0.0002201791,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005181059,"about_ca_topic_score_gemma":0.001247084,"domain_scores_codex":[0.9999068,0.000004123354,0.000006901685,0.00002440146,0.00004090125,0.00001683013],"domain_scores_gemma":[0.9998823,0.0000227962,0.00002809246,0.00002657248,0.00002467901,0.00001551485],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001223058,0.000005063082,0.00005963298,0.00003117866,0.000004386181,0.00003372533,0.00000887094,0.00005268356,0.9988351,0.00006455184,0.00003201914,0.0008605377],"study_design_scores_gemma":[0.000006372413,0.00005790366,0.0009928364,0.000001999442,0.000008940689,0.00007470343,0.00001048288,0.0005371168,0.9970672,0.00003630627,0.001202627,0.00000352595],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9801027,0.0008058783,0.01534311,0.0001039054,0.0001610626,0.00008423315,0.0008449653,0.000350755,0.002203297],"genre_scores_gemma":[0.953034,0.001200574,0.04081486,0.0000669587,0.00004161551,0.0001234726,0.0006968273,0.00005570784,0.003966061],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008094335,"threshold_uncertainty_score":0.002707839,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01128528583881299,"score_gpt":0.2344550239602866,"score_spread":0.2231697381214736,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}