{"id":"W2162827367","doi":"10.5555/832284.835426","title":"T3: Trends and Challenges in VLSI Technology Scaling towards 100nm","year":2002,"lang":"en","type":"article","venue":"Asia and South Pacific Design Automation Conference","topic":"Advancements in Semiconductor Devices and Circuit Design","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Transistor; Very-large-scale integration; Computer science; Skew; Electronic engineering; Node (physics); Transistor count; Silicon on insulator; Jitter; Electrical engineering; Engineering; Materials science; Telecommunications; Silicon; Voltage; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007362597,0.000365284,0.0002230635,0.0005402373,0.000395803,0.00219906,0.0005610374,0.001650183,0.02099663],"category_scores_gemma":[0.001222585,0.0002006897,0.000231376,0.001871462,0.0003292676,0.002803284,0.0003900234,0.001019719,0.00828476],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008123702,"about_ca_system_score_gemma":0.001186994,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001315358,"about_ca_topic_score_gemma":0.002083007,"domain_scores_codex":[0.9997484,0.00003601583,0.00001725514,0.00002751933,0.0001355599,0.00003527075],"domain_scores_gemma":[0.9994954,0.0001493314,0.00003995642,0.0000158962,0.0002443814,0.00005512687],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00008773927,0.00005146855,0.0015313,0.001733445,0.00001386051,0.0003018068,0.0002803793,0.002726777,0.01361038,0.04300064,0.2603342,0.6763279],"study_design_scores_gemma":[0.00001383765,0.0001862318,0.002389168,0.0004188744,0.0000158316,0.0009062859,0.0005048105,0.004763299,0.003496555,0.02288809,0.9643897,0.00002736988],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"review","genre_scores_codex":[0.05148108,0.3502387,0.08799545,0.09641224,0.009585483,0.000253919,0.001765604,0.003273238,0.3989943],"genre_scores_gemma":[0.2067744,0.4033243,0.08377322,0.02246582,0.00731106,0.0003379093,0.002901234,0.00086428,0.2722478],"genre_candidate":"review","genre_consensus":null,"teacher_disagreement_score":0.02099663,"threshold_uncertainty_score":0.07024074,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.09227699011412348,"score_gpt":0.2404851329203492,"score_spread":0.1482081428062257,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}