{"id":"W2166089731","doi":"10.1109/tnano.2007.913430","title":"A Nanodamascene Process for Advanced Single-Electron Transistor Fabrication","year":2008,"lang":"en","type":"article","venue":"IEEE Transactions on Nanotechnology","topic":"Advancements in Semiconductor Devices and Circuit Design","field":"Engineering","cited_by":54,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Coulomb blockade; Transistor; Fabrication; Materials science; Field-effect transistor; Nanowire; Silicon; Optoelectronics; Process (computing); Nanoelectronics; MOSFET; Nanotechnology; Electrical engineering; Computer science; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008478411,0.0003208658,0.0002483612,0.0002149802,0.0003734597,0.0002406387,0.0004130311,0.0002609536,0.001775615],"category_scores_gemma":[0.0001567034,0.0002197163,0.0001292883,0.0001641299,0.0001972074,0.0003639544,0.0003577469,0.0005213654,0.0007971525],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003787095,"about_ca_system_score_gemma":0.0003008905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002588037,"about_ca_topic_score_gemma":0.001294545,"domain_scores_codex":[0.9998568,0.00000533572,0.00000665116,0.00003374016,0.00008719732,0.00001018203],"domain_scores_gemma":[0.9999176,0.00001925796,0.00002151437,0.00001784269,0.00001335816,0.00001042392],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007975831,0.000008353896,0.00004366122,0.00004724859,0.000001797175,0.00007164208,0.000020735,0.0001767202,0.9941398,0.001494281,0.0001799495,0.003807948],"study_design_scores_gemma":[0.00001420746,0.0001122695,0.000492684,0.000009765929,0.000005037787,0.0005351066,0.0000112815,0.00360497,0.9693255,0.0007556136,0.02511921,0.00001423353],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5573012,0.005189236,0.3984905,0.0009427468,0.0008487229,0.0007031438,0.001288183,0.002419967,0.03281629],"genre_scores_gemma":[0.703666,0.002569874,0.280054,0.0001550595,0.00007627316,0.0005633266,0.0005530378,0.0001184974,0.012244],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001775615,"threshold_uncertainty_score":0.00594002,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02640602640180455,"score_gpt":0.2488146417923115,"score_spread":0.2224086153905069,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}